Investigation of aluminum coatings deposited by RF and DC magnetron sputtering as optical-blocking layers for optical blocking filters

IF 3.8 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Optical Materials Pub Date : 2025-07-16 DOI:10.1016/j.optmat.2025.117329

Na Gao , Tianxiang Chen , Yupeng Xu , Huilin He , Yuanyuan Du , Zhenyu Wu , Yichen Liu

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Abstract

In the field of X-ray space detection, the optical blocking filter that can transmit X-ray and block UV, visible and infrared (UV-VIS-IR) light is required. Reducing the UV-VIS-IR light transmittance of optical blocking filters is beneficial for enhancing the detection accuracy of X-ray detectors. The combination of polyimide film and aluminum coating is the most commonly used design of optical blocking filter. Aluminum coatings are prepared using the magnetron sputtering method. The density of the aluminum coating directly affects the performance of optical blocking filter in blocking UV-VIS-IR light. The microstructure, crystallinity, and optical properties of the aluminum coatings on OBFs prepared by RF and DC magnetron sputtering modes were investigated. The results indicate that the optical properties of the optical blocking filter prepared by DC sputtering are superior to those prepared by RF sputtering.

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射频和直流磁控溅射沉积铝膜作为光阻挡滤光片的光阻挡层的研究

在x射线空间探测领域，需要能够传输x射线、阻挡UV、可见光和红外光（UV- vis - ir）的光学阻挡滤光片。降低光学阻挡滤光片的UV-VIS-IR透光率有利于提高x射线探测器的探测精度。聚酰亚胺薄膜与铝涂层的结合是最常用的光学阻片设计。采用磁控溅射法制备铝涂层。铝涂层的密度直接影响滤光片阻挡UV-VIS-IR光的性能。研究了射频磁控溅射和直流磁控溅射制备的obf表面铝涂层的微观结构、结晶度和光学性能。结果表明，直流溅射法制备的光阻滤波器的光学性能优于射频溅射法制备的光阻滤波器。

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来源期刊

Optical Materials 工程技术-材料科学：综合

CiteScore

6.60

自引率

12.80%

发文量

1265

审稿时长

38 days

期刊介绍： Optical Materials has an open access mirror journal Optical Materials: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. The purpose of Optical Materials is to provide a means of communication and technology transfer between researchers who are interested in materials for potential device applications. The journal publishes original papers and review articles on the design, synthesis, characterisation and applications of optical materials. OPTICAL MATERIALS focuses on: • Optical Properties of Material Systems; • The Materials Aspects of Optical Phenomena; • The Materials Aspects of Devices and Applications. Authors can submit separate research elements describing their data to Data in Brief and methods to Methods X.