Study on electrostatic elimination characteristics of silicon needle discharge

Abstract

In the process of semiconductor production, charge accumulation can easily lead to electrostatic breakdown of the chip. With a silicon needle as the electrode, the DC high voltage electrostatic eliminator can achieve effective electrostatic control without metal impurities. Therefore, it has a broad application prospect. To investigate the efficacy and characteristics of electrostatic elimination using silicon needle electrodes, a test platform was established to evaluate their performance under the direct current conditions. The static decay time and balance voltage of the electrostatic elimination were determined as the characteristic indices. This study examined the influence of voltage amplitude, voltage polarity, operating distance and wind speed on the electrostatic elimination. The experimental results indicate that an increase in voltage accelerates the speed of electrostatic dissipation. A polarity effect was observed during the electrostatic elimination process of silicon needles. The static decay time under negative polarity is shorter than that under positive polarity. Furthermore, the balance voltage of negative polarity demonstrates superior performance compared to positive polarity. Additionally, the static decay time increases nonlinearly with the increase of the operating distance. In order to achieve high speed and balance in electrostatic elimination performance, it is recommended to add a specific direction of wind around the electrode, which also reduces the output requirements of the power supply.