Fast magnetron sputtering of LiPON from carbon-doped Li3PO4 target

IF 3.3 4区材料科学 Q3 CHEMISTRY, PHYSICAL

Solid State Ionics Pub Date : 2025-07-14 DOI:10.1016/j.ssi.2025.116957

Nicolas Osenciat, Erica D. Clinton, Joel Casella, Alessia Romio, André Müller, Evgeniia Gilshtein, Moritz H. Futscher, Yaroslav E. Romanyuk

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引用次数: 0

Abstract

Thin layers of lithium phosphorus oxynitride (LiPON) have been deposited by RF and DC magnetron sputtering from a conductive carbon-doped Li₃PO₄ ceramic target. We investigate the deposition rate, composition, morphology, and electrochemical properties of sputtered LiPON solid-state electrolyte layers. It is possible to increase the deposition rate in RF and DC modes by a factor of four to ten compared to the reference RF sputtering from the undoped target. X-ray photoelectron spectroscopy did not detect residual carbon impurities in as-deposited LiPON. The layers exhibit comparable electrochemical properties and ionic conductivity in the range of 2–5 · 10⁻⁷ S/cm, which can be further improved when co-sputtering with Li₂O. The 300-nm-thin RF-co-sputtered LiPON solid separator has been integrated into a thin-film battery with a Li-metal anode, which showed negligible degradation after 190 cycles.

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碳掺杂Li3PO4靶的快速磁控溅射研究

利用射频和直流磁控溅射技术，在导电碳掺杂Li3PO4陶瓷靶上沉积了薄层的氧化氮化磷锂（LiPON）。我们研究了溅射LiPON固态电解质层的沉积速率、组成、形貌和电化学性能。与未掺杂目标的参考射频溅射相比，可以将RF和DC模式下的沉积速率提高4到10倍。x射线光电子能谱未检测到沉积态LiPON中残留的碳杂质。电化学性能和离子电导率在2-5·10−7 S/cm范围内，与Li2O共溅射可进一步提高。300纳米厚的rf共溅射LiPON固体分离器已被集成到具有锂金属阳极的薄膜电池中，在循环190次后，电池的退化可以忽略不计。

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来源期刊

Solid State Ionics 物理-物理：凝聚态物理

CiteScore

6.10

自引率

3.10%

发文量

152

审稿时长

58 days

期刊介绍： This interdisciplinary journal is devoted to the physics, chemistry and materials science of diffusion, mass transport, and reactivity of solids. The major part of each issue is devoted to articles on: (i) physics and chemistry of defects in solids; (ii) reactions in and on solids, e.g. intercalation, corrosion, oxidation, sintering; (iii) ion transport measurements, mechanisms and theory; (iv) solid state electrochemistry; (v) ionically-electronically mixed conducting solids. Related technological applications are also included, provided their characteristics are interpreted in terms of the basic solid state properties. Review papers and relevant symposium proceedings are welcome.