Globally smooth lemniscate trajectory with adaptive integral terminal sliding mode control and inversion-based hysteresis compensation for pi ezoelectric stage precise tracking

IF 5.4 2区计算机科学 Q1 AUTOMATION & CONTROL SYSTEMS

Control Engineering Practice Pub Date : 2025-07-12 DOI:10.1016/j.conengprac.2025.106486

Jim-Wei Wu (Senior Member IEEE) , Ting-Kuei Hsu , Jia-Cheng Li , Yu-Han Lin , Sung-Hua Chen

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引用次数: 0

Abstract

High-precision measurement systems use an xy-axis piezoelectric scanner following a pre-determined trajectory to achieve three-dimensional scanning at micro/nano-scales. Most systems employ a raster scanning trajectory due to ease of implementation; however, raster scanning generates infinite odd harmonics, which can induce mechanical resonance leading to image distortion. Moreover, the nonlinear response characteristics of piezoelectric materials frequently result in unexpected displacements. This paper presents a novel sequential scanning trajectory that eliminates the need for a step function and minimizes the risk of mapping errors. An advanced controller combining an inverse hysteresis model with adaptive integral terminal sliding mode control (AITSMC) was developed and first applied in the piezoelectric scanner through theoretical derivation and stability analysis to prove its feasibility. In simulations and experiments, the proposed controller significantly mitigated the effects of hysteresis during trajectory tracking and achieved superior tracking accuracy and lower RMSE compared to existing sliding mode controllers.

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基于自适应积分末端滑模控制和逆滞后补偿的全局光滑运动轨迹，实现了压电级的精确跟踪

高精度测量系统使用x轴压电扫描仪，遵循预定的轨迹，实现微/纳米尺度的三维扫描。由于易于实现，大多数系统采用光栅扫描轨迹；然而，光栅扫描产生无限奇次谐波，会引起机械共振，导致图像畸变。此外，压电材料的非线性响应特性经常导致意外位移。本文提出了一种新的顺序扫描轨迹，消除了对阶跃函数的需要，并将映射误差的风险降至最低。提出了一种将逆滞回模型与自适应积分终端滑模控制（AITSMC）相结合的先进控制器，并通过理论推导和稳定性分析，首次应用于压电扫描仪。在仿真和实验中，与现有滑模控制器相比，该控制器显著减轻了轨迹跟踪过程中的滞后影响，实现了更高的跟踪精度和更低的RMSE。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Control Engineering Practice 工程技术-工程：电子与电气

CiteScore

9.20

自引率

12.20%

发文量

183

审稿时长

44 days

期刊介绍： Control Engineering Practice strives to meet the needs of industrial practitioners and industrially related academics and researchers. It publishes papers which illustrate the direct application of control theory and its supporting tools in all possible areas of automation. As a result, the journal only contains papers which can be considered to have made significant contributions to the application of advanced control techniques. It is normally expected that practical results should be included, but where simulation only studies are available, it is necessary to demonstrate that the simulation model is representative of a genuine application. Strictly theoretical papers will find a more appropriate home in Control Engineering Practice''s sister publication, Automatica. It is also expected that papers are innovative with respect to the state of the art and are sufficiently detailed for a reader to be able to duplicate the main results of the paper (supplementary material, including datasets, tables, code and any relevant interactive material can be made available and downloaded from the website). The benefits of the presented methods must be made very clear and the new techniques must be compared and contrasted with results obtained using existing methods. Moreover, a thorough analysis of failures that may happen in the design process and implementation can also be part of the paper. The scope of Control Engineering Practice matches the activities of IFAC. Papers demonstrating the contribution of automation and control in improving the performance, quality, productivity, sustainability, resource and energy efficiency, and the manageability of systems and processes for the benefit of mankind and are relevant to industrial practitioners are most welcome.