{"title":"Microstructure and surface monitoring of ECG signals for CrTiN-Ni coatings as dry bioelectrodes","authors":"Zhiwei Wu , Sirui Zhao , Tonglin Qian , Tao Zhou","doi":"10.1016/j.vacuum.2025.114576","DOIUrl":null,"url":null,"abstract":"<div><div>The CrTiN-Ni coatings were fabricated using unbalanced magnetron sputtering. These coatings primarily consist of CrN and TiN crystalline phases, with a relatively high Ni content ranging from 52.4 at.% to 64.0 at.%. The coatings exhibit relatively low contact impedance with a Ni content of 58.9–61.0 at.%. The noise impedance (R<sub>n</sub>) of the CrTiN-Ni coating dry electrodes ranges from 1.11–1.90 × 10<sup>6</sup> Ω at a frequency of 1Hz, which is lower than that of the Ag/AgCl wet electrode (2.58 × 10<sup>6</sup> Ω). In the static testing of electrocardiogram (ECG) signals, the signal power of CrTiN-Ni coated dry electrodes was measured to be 1.1 × 10<sup>−3</sup> to 1.3 × 10<sup>−3</sup> W, which is approximately one order of magnitude higher than that of commercial wet electrodes (7.2× 10<sup>−4</sup> W). In dynamic measurements, the signal power of all coating dry electrodes consistently exceeded that of commercial wet electrode. Additionally, the coated dry electrodes exhibited a relatively high signal-to-noise ratio (SNR), ranging from 56.7 to 65.1 dB, which is comparable to that of commercial wet electrodes (63.3 dB). This suggests that coated dry electrodes have considerable potential for use as dry bioelectrodes in practice.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114576"},"PeriodicalIF":3.8000,"publicationDate":"2025-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25005664","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
The CrTiN-Ni coatings were fabricated using unbalanced magnetron sputtering. These coatings primarily consist of CrN and TiN crystalline phases, with a relatively high Ni content ranging from 52.4 at.% to 64.0 at.%. The coatings exhibit relatively low contact impedance with a Ni content of 58.9–61.0 at.%. The noise impedance (Rn) of the CrTiN-Ni coating dry electrodes ranges from 1.11–1.90 × 106 Ω at a frequency of 1Hz, which is lower than that of the Ag/AgCl wet electrode (2.58 × 106 Ω). In the static testing of electrocardiogram (ECG) signals, the signal power of CrTiN-Ni coated dry electrodes was measured to be 1.1 × 10−3 to 1.3 × 10−3 W, which is approximately one order of magnitude higher than that of commercial wet electrodes (7.2× 10−4 W). In dynamic measurements, the signal power of all coating dry electrodes consistently exceeded that of commercial wet electrode. Additionally, the coated dry electrodes exhibited a relatively high signal-to-noise ratio (SNR), ranging from 56.7 to 65.1 dB, which is comparable to that of commercial wet electrodes (63.3 dB). This suggests that coated dry electrodes have considerable potential for use as dry bioelectrodes in practice.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.