Evaluation of gamma- and neutron radiation emissions during proton irradiation of typical metals in semiconductor manufacturing

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-07-12 DOI:10.1016/j.nimb.2025.165777

Andrea Fugger , Moriz Jelinek , Markus Valtiner

引用次数: 0

Abstract

Proton implantation has multiple uses in semiconductor manufacturing. Implanting through metallization can create problems in terms of radiation safety. Gamma and neutron emissions for proton irradiated stacks of Ti, TiN, W, AlCu, Si, Co with incident proton energies of 1 MeV to 2 MeV were measured. The most intense gamma lines resulted from Al, Si, F and Ti. Despite being present in trace amounts, F was found to contribute significantly to the gamma emission. Our results indicate a need for new metallization concepts to be used together with proton implantation.

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半导体制造中典型金属质子辐照过程中伽马和中子辐射发射的评价

质子注入在半导体制造中有多种用途。通过金属化植入会产生辐射安全方面的问题。测量了入射质子能量为1 ~ 2 MeV的Ti、TiN、W、AlCu、Si、Co质子辐照堆的γ辐射和中子辐射。Al、Si、F和Ti的γ谱线强度最大。尽管存在痕量，但发现F对伽马辐射有显著贡献。我们的结果表明需要新的金属化概念与质子注入一起使用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.