High-Rate Deposition and Characterization Study of CoZrO Films for On-Chip Power Applications

Abstract

CoZrO Films

A transmission electron micrograph shows the nanostructure and composition of the studied CoZrO films, imagined as the core of an inductor. In article number 2402626, Alex J. Hanson, Jean Anne C. Incorvia, and co-workers develop a high-rate reactive sputtering process for CoZrO films. Characterization reveals that ideal magnetic properties require chemical compositions in a narrow Co:O range and uniform microstructure. This process enables scalable production of high-quality magnetic films for integrated power converter applications. Image created by undergraduate student Zhikai Tang.