Fabrication and Optical Characterization of Low-Loss Barium Titanate Waveguides

IF 2.3 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Technology Letters Pub Date : 2025-06-24 DOI:10.1109/LPT.2025.3582846

M Ifaz Ahmad Isti;Xiaofeng Zhu;Marco Tulio Moller de Freitas;Peng Yao;Mohammad Jobayer Hossain;Shouyuan Shi;Garrett Schneider;Dennis W. Prather

引用次数: 0

Abstract

This letter presents low-loss monolithic Barium Titanium Oxide (BaTiO3), hereafter referred to as BTO, waveguides fabricated on a Silicon-on-insulator (SOI) platform, using a novel measurement approach based on optical back-scattering reflectometry (OBR). Utilizing this method, a low average propagation loss of 0.7 dB/cm was achieved for a straight waveguide which, to our knowledge, is the lowest propagation loss reported to date based on long BTO ridge-waveguides. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) highlight the smooth sidewalls responsible for lowering the waveguide loss. Design simulations and fabrication processes are presented, followed by optical characterization.

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低损耗钛酸钡波导的制备与光学特性

这封信介绍了低损耗单片氧化钡（BaTiO3），以下简称BTO，在绝缘体上硅（SOI）平台上制造的波导，使用一种基于光学后向散射反射（OBR）的新型测量方法。利用这种方法，直线波导的平均传播损耗为0.7 dB/cm，据我们所知，这是迄今为止基于长BTO脊波导的最低传播损耗报告。原子力显微镜（AFM）和扫描电子显微镜（SEM）强调光滑的侧壁负责降低波导损耗。介绍了设计仿真和制造过程，然后进行了光学表征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Photonics Technology Letters 工程技术-工程：电子与电气

CiteScore

5.00

自引率

3.80%

发文量

404

审稿时长

2.0 months

期刊介绍： IEEE Photonics Technology Letters addresses all aspects of the IEEE Photonics Society Constitutional Field of Interest with emphasis on photonic/lightwave components and applications, laser physics and systems and laser/electro-optics technology. Examples of subject areas for the above areas of concentration are integrated optic and optoelectronic devices, high-power laser arrays (e.g. diode, CO2), free electron lasers, solid, state lasers, laser materials'' interactions and femtosecond laser techniques. The letters journal publishes engineering, applied physics and physics oriented papers. Emphasis is on rapid publication of timely manuscripts. A goal is to provide a focal point of quality engineering-oriented papers in the electro-optics field not found in other rapid-publication journals.