Accurate and Effective Geometric Error Compensation for Ultrahigh-Precision Coordinate Measuring Machine Using Laser Tracking Interferometer

IF 5.6 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Jian Liang;Zefeng Sun;Jiehu Kang;Shanzhai Feng;Shuyang Wang;Zongyang Zhao;Luyuan Feng;Shangyong Li;Bin Wu
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引用次数: 0

Abstract

Geometric errors in coordinate measuring machines (CMMs) significantly degrade measurement accuracy. While laser tracking interferometer (LTI)-based compensation methods are widely used due to their high efficiency, the limited precision of the existing positioning techniques restricts their application in ultrahigh-precision CMMs. To address these challenges, this study introduces an accurate and efficient geometric error compensation method that utilizes LTI positioning for ultrahigh-precision CMMs. The method begins with the development of a geometric error model that employs homogeneous transformation matrices (HTMs) to map end-position deviations to error parameters. A highly accurate and robust positioning algorithm for LTI is then designed, incorporating a two-step process: initial positioning through semidefinite programming (SDP) and fine-tuning using enhanced particle swarm optimization (EPSO). After parameter identification, geometric error compensation is applied based on the established model. The test experiments were conducted on a CMM with the nominal accuracy of $2\:\pm \: L$ [mm]/ $400 \: \:\mu $ m. The positioning results show that the proposed method achieves a distance mean absolute error of 0.10871, demonstrating superior precision over conventional methods. Additionally, the method exhibits excellent robustness and stability under noise interference. After compensation, precision validation results showed that the maximum detection error was reduced to $ 0.26\:\mu $ m, with length measurement errors within $0.5\:\pm \: L$ [mm]/ $400 \:\: \mu $ m. These results highlight substantial improvements in both measurement precision and operational performance. This research presents an effective solution for geometric error compensation in CMMs, offering enhanced performance for industrial measurement applications.
激光跟踪干涉仪高精度三坐标测量机精确有效的几何误差补偿
三坐标测量机的几何误差严重影响测量精度。基于激光跟踪干涉仪(LTI)的补偿方法因其效率高而得到广泛应用,但现有定位技术的精度有限,限制了其在超高精度三坐标测量机中的应用。为了解决这些挑战,本研究引入了一种精确高效的几何误差补偿方法,该方法利用LTI定位用于超高精度三坐标测量机。该方法首先建立了一个几何误差模型,该模型采用齐次变换矩阵(HTMs)将末端位置偏差映射到误差参数。然后设计了一种高精度和鲁棒的LTI定位算法,包括两步过程:通过半确定规划(SDP)进行初始定位和使用增强粒子群优化(EPSO)进行微调。参数辨识完成后,根据建立的模型进行几何误差补偿。在标称精度为$2\:\pm \: L$ [mm]/ $400 \:\:\mu $ m的三坐标测量机上进行了测试实验。定位结果表明,该方法的距离平均绝对误差为0.10871,精度优于传统方法。此外,该方法在噪声干扰下具有良好的鲁棒性和稳定性。补偿后的精度验证结果表明,最大检测误差降至$ 0.26\:\mu $ m,长度测量误差在$0.5\:\pm \: L$ [mm]/ $400 \:\: \mu $ m以内,测量精度和操作性能均有显著提高。该研究为三坐标测量机的几何误差补偿提供了一种有效的解决方案,为工业测量应用提供了更高的性能。
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来源期刊
IEEE Transactions on Instrumentation and Measurement
IEEE Transactions on Instrumentation and Measurement 工程技术-工程:电子与电气
CiteScore
9.00
自引率
23.20%
发文量
1294
审稿时长
3.9 months
期刊介绍: Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.
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