Breaking the mid-spatial-frequency noise floor to sub-nanometer in Fizeau interferometry via anisotropic spatial-coherence engineering.

IF 3.1 2区 物理与天体物理 Q2 OPTICS
Optics letters Pub Date : 2025-07-01 DOI:10.1364/OL.567026
Xinming Li, Shaojing Peng, Zhaorui Xu, Jian Bai, Lan Wu, Yibing Shen, Dong Liu
{"title":"Breaking the mid-spatial-frequency noise floor to sub-nanometer in Fizeau interferometry via anisotropic spatial-coherence engineering.","authors":"Xinming Li, Shaojing Peng, Zhaorui Xu, Jian Bai, Lan Wu, Yibing Shen, Dong Liu","doi":"10.1364/OL.567026","DOIUrl":null,"url":null,"abstract":"<p><p>Anisotropic spatial-coherence engineering via illumination modulation is demonstrated to selectively suppress the mid-spatial-frequency (MSF) noise in interferometry. Using a 3D spatial-coherence model, we prove the superiority of a synthetic ring source with anisotropic spatial-coherence function in Fizeau systems and reveal characteristic residual noise patterns of a zero-order Bessel function. A noise transfer function (NTF) is proposed as an essential complement to the instrument transfer function (ITF) framework, enabling quantitative assessment of noise suppression across all spatial frequencies. With the proposed method, NTF < 0.4 and ITF > 0.8 within 9.1 lp/mm are achieved in a 632.8-nm, 4-in. Fizeau interferometer, breaking the MSF noise floor to sub-1 nm. This work provides a rapid, full-aperture measurement solution for MSF errors on high-precision optical surfaces.</p>","PeriodicalId":19540,"journal":{"name":"Optics letters","volume":"50 13","pages":"4410-4413"},"PeriodicalIF":3.1000,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/OL.567026","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0

Abstract

Anisotropic spatial-coherence engineering via illumination modulation is demonstrated to selectively suppress the mid-spatial-frequency (MSF) noise in interferometry. Using a 3D spatial-coherence model, we prove the superiority of a synthetic ring source with anisotropic spatial-coherence function in Fizeau systems and reveal characteristic residual noise patterns of a zero-order Bessel function. A noise transfer function (NTF) is proposed as an essential complement to the instrument transfer function (ITF) framework, enabling quantitative assessment of noise suppression across all spatial frequencies. With the proposed method, NTF < 0.4 and ITF > 0.8 within 9.1 lp/mm are achieved in a 632.8-nm, 4-in. Fizeau interferometer, breaking the MSF noise floor to sub-1 nm. This work provides a rapid, full-aperture measurement solution for MSF errors on high-precision optical surfaces.

利用各向异性空间相干工程将菲索干涉测量中的中频噪声底破至亚纳米级。
通过照明调制的各向异性空间相干工程可以选择性地抑制干涉测量中的中空频噪声。利用三维空间相干模型,证明了具有各向异性空间相干函数的合成环源在菲索系统中的优越性,揭示了零阶贝塞尔函数的特征残余噪声模式。提出了噪声传递函数(NTF)作为仪器传递函数(ITF)框架的重要补充,可以对所有空间频率的噪声抑制进行定量评估。采用该方法,在632.8 nm, 4-in的芯片上实现了9.1 lp/mm以内的NTF 0.8。菲索干涉仪,将MSF噪声底限降到1nm以下。这项工作为高精度光学表面上的MSF误差提供了一种快速、全孔径测量解决方案。
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来源期刊
Optics letters
Optics letters 物理-光学
CiteScore
6.60
自引率
8.30%
发文量
2275
审稿时长
1.7 months
期刊介绍: The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community. Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.
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