Xinming Li, Shaojing Peng, Zhaorui Xu, Jian Bai, Lan Wu, Yibing Shen, Dong Liu
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引用次数: 0
Abstract
Anisotropic spatial-coherence engineering via illumination modulation is demonstrated to selectively suppress the mid-spatial-frequency (MSF) noise in interferometry. Using a 3D spatial-coherence model, we prove the superiority of a synthetic ring source with anisotropic spatial-coherence function in Fizeau systems and reveal characteristic residual noise patterns of a zero-order Bessel function. A noise transfer function (NTF) is proposed as an essential complement to the instrument transfer function (ITF) framework, enabling quantitative assessment of noise suppression across all spatial frequencies. With the proposed method, NTF < 0.4 and ITF > 0.8 within 9.1 lp/mm are achieved in a 632.8-nm, 4-in. Fizeau interferometer, breaking the MSF noise floor to sub-1 nm. This work provides a rapid, full-aperture measurement solution for MSF errors on high-precision optical surfaces.
期刊介绍:
The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community.
Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.