The Improvement of High-Frequency Performances and the Inductance of Micro-Inductors by Tuning the B-Gradient in Composition Gradient Sputtered FeCoB Thin Films
IF 1.9 3区 工程技术Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Dalong Qiu;Xiaosong Wang;Shipeng Zhang;Wencai Lv;Shuguang Yi;Ming Liu;Yifei Zhang;Shandong Li
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引用次数: 0
Abstract
The static and dynamic magnetic properties of 50 nm thick iron-cobalt-boron (FeCoB) soft magnetic films, fabricated using a composition gradient sputtering (CGS) method on intrinsic Si (100) substrates, are studied as a function of the B composition gradient. By optimizing the B composition gradient, larger stress is induced, resulting in an increase of the uniaxial magnetic anisotropy field ${H} _{k}$ from 229.7 to 720.1 Oe and an increase in ferromagnetic resonance (FMR) frequency from 5.8 to 9.27 GHz. These are attributed to the B doping, which eliminated magneto-crystalline anisotropy, with the stress induced by the composition gradient becoming the dominant factor. The film was then integrated as a magnetic core into a planar spiral inductor, resulting in a 24.6% increase in inductance, demonstrating the potential of this film as a material for magnetic cores in high-frequency electronic components.
期刊介绍:
Science and technology related to the basic physics and engineering of magnetism, magnetic materials, applied magnetics, magnetic devices, and magnetic data storage. The IEEE Transactions on Magnetics publishes scholarly articles of archival value as well as tutorial expositions and critical reviews of classical subjects and topics of current interest.