All-alumina quarter-wave plate coatings fabricated by glancing angle deposition using serial bideposition

IF 6.9 2区材料科学 Q2 CHEMISTRY, PHYSICAL

Applied Surface Science Pub Date : 2025-07-01 DOI:10.1016/j.apsusc.2025.163957

Solène Bertet , Marcela Mireles , Sara MacNally , Marine Chorel , Éric Lavastre , Daniel Sadowski , Corinne Marcel , Bruno Gallas

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Abstract

Anisotropic phase retarders, used in high power laser facilities to perform polarization smoothing, can be obtained by the glancing angle deposition (GLAD) coating process. Due to its high laser resistance, the coatings are mainly made of silica. Therefore, limited attention has been given to other dielectric materials. Here we present a study on alumina GLAD anisotropic coatings; a material with high laser resistance, higher birefringence and lower environmental sensitivity than silica. Since the anisotropy is related to the coatings microstructure through the deposition angle, samples were coated at angles varying from ± 68° to ± 82° using the serial bideposition technique. They were characterized by ellipsometry, polarimetry, spectrophotometry and electron microscopy. We showed that the highest birefringence is obtained at a deposition angle of ± 76° with an in-plane value of 0.053. Based on these results, a quarter-wave plate at 351 nm was designed as a multilayer with seven pairs of anisotropic layers deposited at ± 76° and isotropic layers deposited at 0°. The fabricated coating exhibited a uniform retardance of 88.51 ± 0.45 nm. The alumina GLAD wave plates presented here, open the door to new possibilities in the laser field and especially in the field of fusion energy.

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用连续双沉积法制备全氧化铝四分之一波板涂层

各向异性相位缓速器可通过掠角沉积（GLAD）涂层工艺获得，用于高功率激光设备的偏振平滑。由于其耐激光性高，涂层主要由二氧化硅制成。因此，对其他介电材料的关注有限。本文研究了氧化铝GLAD各向异性涂层；一种比二氧化硅具有高激光电阻、高双折射和低环境敏感性的材料。由于各向异性通过沉积角度与涂层的微观结构有关，因此采用串联双沉积技术对样品进行了 ± 68°至 ± 82°的涂覆。采用椭偏法、偏振法、分光光度法和电镜对其进行了表征。结果表明，当沉积角为 ± 76°时，双折射率最高，面内值为0.053。在此基础上，在351 nm处设计了一个四分之一波片，其中7对各向异性层在 ± 76°处沉积，各向同性层在0°处沉积。制备的涂层的缓速均匀，为88.51 ± 0.45 nm。本文介绍的氧化铝GLAD波片，为激光领域特别是聚变能领域的新可能性打开了大门。

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来源期刊

Applied Surface Science 工程技术-材料科学：膜

CiteScore

12.50

自引率

7.50%

发文量

3393

审稿时长

67 days

期刊介绍： Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.