Louis Rassinfosse , Emile Haye , Michel Voué , Olivier Deparis , Stéphane Lucas
{"title":"Optimization of plasmonic multilayer stacks through control of magnetron sputtering deposition conditions","authors":"Louis Rassinfosse , Emile Haye , Michel Voué , Olivier Deparis , Stéphane Lucas","doi":"10.1016/j.vacuum.2025.114490","DOIUrl":null,"url":null,"abstract":"<div><div>Understanding the growth mechanisms of metallic silver nanoparticles is crucial for optimizing their use in advanced optical applications, such as plasmonic devices and sensors. This study examined the growth of silver nanoparticles deposited by DC magnetron sputtering, focusing on the effects of deposition pressure, substrate material, and sample temperature. Multilayer plasmonic stacks were analyzed using techniques such as X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and transmission electron microscopy (TEM) with energy dispersive X-ray spectroscopy (EDS). These characterizations are supported by finite-difference time-domain (FDTD) simulations to model and compare the optical response with experimentally obtained spectra. The results demonstrate the influence of deposition conditions on nanoparticle distribution, shape, and optical properties, offering insights and simulation tools for optimizing large-area plasmonic systems.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114490"},"PeriodicalIF":3.8000,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25004804","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Understanding the growth mechanisms of metallic silver nanoparticles is crucial for optimizing their use in advanced optical applications, such as plasmonic devices and sensors. This study examined the growth of silver nanoparticles deposited by DC magnetron sputtering, focusing on the effects of deposition pressure, substrate material, and sample temperature. Multilayer plasmonic stacks were analyzed using techniques such as X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and transmission electron microscopy (TEM) with energy dispersive X-ray spectroscopy (EDS). These characterizations are supported by finite-difference time-domain (FDTD) simulations to model and compare the optical response with experimentally obtained spectra. The results demonstrate the influence of deposition conditions on nanoparticle distribution, shape, and optical properties, offering insights and simulation tools for optimizing large-area plasmonic systems.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.