Crystalline evolution of c-axis aligned IGZO thin films: From deposition to post-annealing

IF 4.2 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Optical Materials Pub Date : 2025-06-28 DOI:10.1016/j.optmat.2025.117287

Yi-Nung Chao , Yuan-Chieh Lu , Gui-Sheng Zeng , Sheng-Hui Chen

引用次数: 0

Abstract

High-Power Impulse Magnetron Sputtering (HiPIMS) has been employed to prepare c-axis aligned crystalline indium-gallium-zinc oxide (CAAC-IGZO) thin films with negative substrate biasing. The chemical composition and crystal structure of the thin film are analyzed using X-ray Diffractometer (XRD) and Transmission Electron Microscope. Atomic Force Microscope is utilized to assess the surface roughness of the CAAC-IGZO thin films. In this study, annealing amorphous IGZO thin films at 1075 °C resulted in the formation of CAAC-IGZO with a smaller full-width at half-maximum in the XRD spectrum. The annealing process leads to the stratification of zinc oxide-based compounds, creating a three-layer structure: the top layer consists of zinc oxide, the middle layer is CAAC-IGZO, and the layer closest to the substrate is also zinc oxide. This phenomenon is explained theoretically by referring metal-induced crystallization and analyzing the changes in Gibbs free energy.

查看原文本刊更多论文

c轴定向IGZO薄膜的结晶演化：从沉积到后退火

采用高功率脉冲磁控溅射（HiPIMS）技术制备了具有负衬底偏置的c轴定向晶体氧化铟镓锌（CAAC-IGZO）薄膜。利用x射线衍射仪（XRD）和透射电镜对薄膜的化学成分和晶体结构进行了分析。利用原子力显微镜对CAAC-IGZO薄膜的表面粗糙度进行了评价。在本研究中，非晶IGZO薄膜在1075℃下退火，形成了CAAC-IGZO，在XRD谱图中，半峰处全宽度较小。退火过程导致氧化锌基化合物分层，形成三层结构：顶层由氧化锌组成，中间层是CAAC-IGZO，最靠近衬底的层也是氧化锌。通过对金属诱导结晶和吉布斯自由能变化的分析，从理论上解释了这一现象。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Optical Materials 工程技术-材料科学：综合

CiteScore

6.60

自引率

12.80%

发文量

1265

审稿时长

38 days

期刊介绍： Optical Materials has an open access mirror journal Optical Materials: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. The purpose of Optical Materials is to provide a means of communication and technology transfer between researchers who are interested in materials for potential device applications. The journal publishes original papers and review articles on the design, synthesis, characterisation and applications of optical materials. OPTICAL MATERIALS focuses on: • Optical Properties of Material Systems; • The Materials Aspects of Optical Phenomena; • The Materials Aspects of Devices and Applications. Authors can submit separate research elements describing their data to Data in Brief and methods to Methods X.