E-type resonant cell based photoacoustic sensor for flowing gas measurement

IF 8 1区化学 Q1 CHEMISTRY, ANALYTICAL

Sensors and Actuators B: Chemical Pub Date : 2025-06-30 DOI:10.1016/j.snb.2025.138223

Xuliang Chen , Yufu Xu , Hongchao Qi, Heng Wang, Chenxi Li, Xinyu Zhao, Ke Chen

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Abstract

An E-type resonant cell based photoacoustic gas analyzer with fast response has been proposed for flowing gas measurement. The proposed sensor integrates diffusion micropores and a silicon cantilever beam to enhance gas exchange efficiency and sensitivity. The resonant tube is completely embedded in the buffer chamber and two diffusion holes with a radius of 250 μm are designed to achieve miniaturization and accelerate the gas response speed, respectively. This design addresses the trade-off between flow measurement noise and response time observed in conventional T-type photoacoustic cells. Simulations and experiments demonstrate that the response time is reduced from 359 s (without micropores) to 22 s (with micropores). The experiment analyzed the influence of different flow rates on the gas diffusion time and flow noise of the E-type photoacoustic cell with micropores. At an integration time of 1 s, the sensor achieves a detection limit of 48.7 ppb for C₂H₂ and a normalized noise equivalent absorption (NNEA) coefficient of 2.9 × 10⁻⁹ cm⁻¹·W·Hz^−1/2.

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基于e型谐振腔的流动气体光声传感器

提出了一种快速响应的e型谐振腔光声气体分析仪，用于流动气体的测量。该传感器集成了扩散微孔和硅悬臂梁，以提高气体交换效率和灵敏度。谐振管完全嵌入缓冲腔内，并设计了两个半径为250 μm的扩散孔，分别实现了小型化和加速气体响应速度。该设计解决了在传统t型光声电池中观察到的流量测量噪声和响应时间之间的权衡。仿真和实验表明，响应时间从无微孔时的359 s缩短到有微孔时的22 s。实验分析了不同流速对带有微孔的e型光声电池气体扩散时间和流动噪声的影响。在1 s的积分时间内，该传感器对C2H2的检测限为48.7 ppb，归一化噪声等效吸收系数为2.9×10-9 cm-1·W·Hz-1/2。

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来源期刊

Sensors and Actuators B: Chemical 工程技术-电化学

CiteScore

14.60

自引率

11.90%

发文量

1776

审稿时长

3.2 months

期刊介绍： Sensors & Actuators, B: Chemical is an international journal focused on the research and development of chemical transducers. It covers chemical sensors and biosensors, chemical actuators, and analytical microsystems. The journal is interdisciplinary, aiming to publish original works showcasing substantial advancements beyond the current state of the art in these fields, with practical applicability to solving meaningful analytical problems. Review articles are accepted by invitation from an Editor of the journal.