Restoring Ultra-Flat Bridgman-Fabricated Single-Crystal Cu(111) Wafers via Recrystallization Arrest Strategy for High-Quality Graphene Epitaxy.

IF 27.4 1区 材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY
Chengjin Wu,Buhang Chen,Haiyang Liu,Xiaofeng Song,Sicong Zheng,Qin Li,Yanyan Dong,Sheng Li,Jiaxin Shao,Pengbo Bian,Jiangli Xue,Xingwei Huang,Xiaoli Sun,Kaicheng Jia,Wei Wei,Zhaoshun Gao,Luzhao Sun,Zhongfan Liu
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Abstract

Single-crystal Cu(111) and its ultra-flat surface are crucial for the heteroepitaxy of high-quality, single-crystal graphene films with minimal folds and additional layers. Bridgman method coupled with cutting and chemical-mechanical polishing presents a straightforward and cost-effective approach for preparing ultra-flat Cu(111) wafers but is simply discarded due to its incompatibility with standard high-temperature procedures for annealing and graphene growth. Herein, an in-depth investigation is conducted into the mechanisms of recrystallization and reverse single-crystallization induced by processing strain and dislocations. A recrystallization arrest strategy is proposed for Bridgman-cutting-polishing (BCP) derived Cu(111) wafers, guaranteeing the high single-crystallinity (96.6%) and flatness (0.81 nm) of epitaxy substrates. The thorough investigation has provided a comprehensive understanding of the effects of surface roughness on the orientation, proportion of adlayers, as well as transfer qualities of graphene films. By highlighting the paramount importance of the Bridgman cutting-polishing methodology, the efforts set the stage for achieving notable cost savings in the manufacture of ultra-flat, single-crystal graphene wafers.
高质量石墨烯外延的再结晶阻滞策略修复桥式制备的超扁平单晶Cu(111)晶片。
单晶Cu(111)及其超平坦的表面对于具有最小褶皱和附加层的高质量单晶石墨烯薄膜的异质外延至关重要。Bridgman方法结合了切割和化学机械抛光,为制备超扁平Cu(111)晶圆提供了一种简单而经济的方法,但由于其与退火和石墨烯生长的标准高温程序不相容而被简单地丢弃。本文对加工应变和位错诱导的再结晶和反单结晶机理进行了深入的研究。提出了一种桥切抛光(BCP)衍生的Cu(111)晶圆的再结晶阻止策略,保证了外延衬底的高单晶度(96.6%)和平坦度(0.81 nm)。通过深入的研究,我们全面了解了表面粗糙度对石墨烯薄膜的取向、涂层比例以及转移质量的影响。通过强调Bridgman切割-抛光方法的重要性,这些努力为实现超扁平单晶石墨烯晶圆制造的显着成本节约奠定了基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Advanced Materials
Advanced Materials 工程技术-材料科学:综合
CiteScore
43.00
自引率
4.10%
发文量
2182
审稿时长
2 months
期刊介绍: Advanced Materials, one of the world's most prestigious journals and the foundation of the Advanced portfolio, is the home of choice for best-in-class materials science for more than 30 years. Following this fast-growing and interdisciplinary field, we are considering and publishing the most important discoveries on any and all materials from materials scientists, chemists, physicists, engineers as well as health and life scientists and bringing you the latest results and trends in modern materials-related research every week.
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