An electrostatic micro-electromechanical systems micromirror with low-torsional stress supported by three-asymptote beam

Chip Pub Date : 2025-03-16 DOI:10.1016/j.chip.2025.100138
Xiao-Yong Fang , Ang Li , Er-Qi Tu, Bo Peng, Zhi-Ran Yi, Wen-Ming Zhang
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Abstract

Micro-electromechanical systems (MEMS) micromirrors are preferred actuators in the field of light beam steering. Electrostatic micromirrors have gained vital attention due to their simple and compact structure. Among performance characteristics, the large field of view (FOV) and high structural reliability are key research hotspots. This work introduced a novel design of a three-asymptote support beam to improve the structural reliability, which is defined as a function with a shape coefficient, A. Simulation results reveal that the three-asymptote beam can reduce the chamfer stress from 690 MPa to 280 MPa compared with the conventional straight beam. Additionally, the resonant frequency of the micromirror can be adjusted via the shape coefficient. The micromirror prototype was fabricated using silicon-on-insulator-based micromachining and double-sided lithography technology. The vertically asymmetric electrostatic actuator comprises movable combs in the device layer and fixed combs in the handle layer. Furthermore, the performance of the prototype was tested in both static and resonant modes. The maximum static mechanical angle is 4.3° with a direct current voltage of 60 V, and the maximum angle is 3.1° at 445 Hz with a peak-to-peak voltage of 20 V in resonant mode.
一种由三渐近线梁支撑的静电微机电系统低扭转应力微镜
微机电系统(MEMS)微镜是光束导向领域中首选的致动器。静电微镜因其结构简单紧凑而受到人们的广泛关注。其中,大视场(FOV)和高结构可靠性是研究的重点。为了提高结构的可靠性,本文提出了一种新的三渐近线支撑梁的设计方法,将其定义为形状系数a的函数。仿真结果表明,与传统的直梁相比,三渐近线支撑梁可以将倒角应力从690 MPa降低到280 MPa。此外,微镜的谐振频率可以通过形状系数来调节。微镜原型采用基于绝缘体上硅的微加工和双面光刻技术制造。垂直不对称静电致动器包括装置层中的活动梳子和手柄层中的固定梳子。此外,还测试了原型在静态和谐振模式下的性能。在直流电压为60 V时,最大静态机械角为4.3°;在谐振模式下,在445 Hz时,最大静态机械角为3.1°,峰值电压为20 V。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
2.80
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