Few-layer graphene growth by annealing C:Ni film grown via high power impulse magnetron sputtering

IF 5.1 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-06-24 DOI:10.1016/j.diamond.2025.112574

Zheng Li, Sen Chen, Hongli Fang, Jiushan Cheng, Lijun Sang, Zhengduo Wang, Zhongwei Liu

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Abstract

Graphene is widely used as an advanced functional carbon material. We report a new high power impulse magnetron sputtering (HiPIMS) process for C:Ni film. After rapid thermal annealing, graphene was directly fabricated on SiO₂/Si substrates. The study systematically investigates the factors influencing the graphene layer number and its quality during preparation, including the C₂H₂ flow rate, deposition time, gas pressure, annealing temperature, annealing time, and heating rate. High-quality few-layer graphene was successfully fabricated under a certain condition: a C₂H₂ flow rate of 0.6 sccm for 60 s, a working pressure of 0.3 Pa, an annealing time of 10 min and an annealing temperature of 900°С. The results provide a method for synthesizing graphene directly on the substrate at low temperatures by HiPIMS, offering significant potential for advancing graphene preparation technology and the application of graphene materials.

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高功率脉冲磁控溅射制备C:Ni薄膜的少层石墨烯生长

石墨烯作为一种先进的功能碳材料被广泛应用。本文报道了一种新的C:Ni薄膜高功率脉冲磁控溅射（HiPIMS）工艺。通过快速热退火，将石墨烯直接制备在SiO2/Si衬底上。本研究系统考察了制备过程中影响石墨烯层数和质量的因素，包括C2H2流速、沉积时间、气体压力、退火温度、退火时间和加热速率。在C2H2流量为0.6 sccm，工作压力为0.3 Pa，退火时间为10 min，退火温度为900°С的条件下，成功制备了高质量的少层石墨烯。该研究结果为HiPIMS直接在衬底上低温合成石墨烯提供了一种方法，为推进石墨烯制备技术和石墨烯材料的应用提供了重要的潜力。

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.