Numerical investigation of interaction between electromagnetic wave and plasma in circular distributed inductively coupled plasma

Abstract

Plasma stealth technology has attracted a lot of attention because of its application in military target radar stealth, as it has unique electromagnetic properties. Benefits of plasma stealth include wider electromagnetic absorption as well as lower application expenditure in comparison with material and shape stealth. Circular inductively coupled plasma performance was evaluated at different times and positions by numerical methods. COMSOL software was used to simulate the system. Two distributions of potential density were formed on ICP due to the presence of a false object. The results showed that electron distribution was developed to the corner with time and electron density became uniform. Also, it was found that the amount of electron density was increased with time, indicating that there was a higher plasma reaction and higher generation of electrons. Furthermore, it was observed that the system temperature is higher where there is higher resistive loss.