Contactless and passive humidity measurement by using ultra-thin GO nanosheet coated SAW sensor

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-06-23 DOI:10.1016/j.sna.2025.116827

Baile Cui , Xu Gao , Zheng Zhao , Xufeng Xue , Qiming Yang , Jing Jin , Wen Wang , Yong Liang , Dongliang Guo

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Abstract

The contractless humidity sensing technology with far distance, high sensitivity and fast response is a favorable method to realize humidity measurement in complex environments. Herein, an ultra-thin 1 nm Graphene oxide (GO) film is deposited on the surface of a reflective delay linear SAW device to construct a SAW humidity sensor for wireless signal excitation and passive sensing. A radio frequency (RF) reader with low noise < ±0.003 dB has been successfully designed and manufactured for stable wireless sensing. The hydrogen bond between GO and water molecules, and the viscoelastic-acoustoelectric coupling effect improved the humidity sensitivity. Remarkably, the prepared SAW humidity sensor achieved high humidity sensitivity (0.46 dB/%RH), low detection limit (0.37 % RH), fast response and recovery speed (T₉₀=15.5 s, T₁₀=16.1 s) and excellent repeatability at 150 cm contractless distance. Practically, the contractless and passive SAW humidity sensor prepared in this study has the potential to realize high-precision and real-time humidity measurement in complex environments.

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超薄氧化石墨烯纳米片镀膜SAW传感器的非接触式被动湿度测量

无合同湿度传感技术具有距离远、灵敏度高、响应快等优点，是实现复杂环境湿度测量的良好方法。本文将1 nm的超薄氧化石墨烯（GO）薄膜沉积在反射延迟线性SAW器件表面，构建了用于无线信号激发和被动传感的SAW湿度传感器。成功地设计和制造了一种低噪声<； ±0.003 dB的射频（RF）读取器，用于稳定的无线传感。氧化石墨烯与水分子之间的氢键和粘弹声电耦合效应提高了材料的湿度敏感性。在所制备的SAW湿度传感器具有较高的湿度灵敏度（0.46 dB/%RH）、较低的检出限（0.37 % RH）、较快的响应和恢复速度（T90=15.5 s, T10=16.1 s）以及在150 cm无收缩距离处良好的重复性。在实际应用中，本研究制备的无合同无源SAW湿度传感器具有实现复杂环境下高精度、实时湿度测量的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...