MOS based gas sensor in detection of volatile organic compounds: A review

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-06-19 DOI:10.1016/j.sna.2025.116818

Chenwei Zhang , Lijun Qian , Wen Zeng

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引用次数: 0

Abstract

Volatile organic compounds (VOCs), as toxic, carcinogenic, and persistent environmental pollutants, chronically contaminate enclosed spaces like indoors and vehicle cabins. Efficient detection is crucial for improving air quality and safeguarding human health. Metal oxide semiconductor (MOS) gas sensors have emerged as the preferred materials to address current detection challenges due to their high sensitivity, low preparation cost and potential for miniaturization. This review systematically examines the sensing mechanisms of MOS materials and recent progress in MOS-based sensors for detecting formaldehyde, acetone, and other common VOCs. Based on the analysis of over a hundred research studies, it has been found that MOS materials suffer from issues such as high operating temperatures, poor selectivity, insufficient long-term stability, and susceptibility to humidity, and we explore how modification strategies such as micromorphology regulation, structural modification, and composite material construction of heterojunctions enhance the sensitivity, selectivity, and operational temperature of MOS sensors. However, challenges persist in achieving synergistic optimization of multiple parameters, hindering practical applications. This review aims to summarize current research methodologies for various MOS materials used in VOC detection, providing design principles and performance benchmarks for developing high-efficiency VOC sensors.

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MOS气体传感器在挥发性有机物检测中的应用综述

挥发性有机化合物（VOCs）是有毒的、致癌的、持久的环境污染物，长期污染室内和车厢等封闭空间。有效的检测对于改善空气质量和保障人类健康至关重要。金属氧化物半导体（MOS）气体传感器因其高灵敏度、低制备成本和小型化潜力而成为解决当前检测挑战的首选材料。本文系统地综述了MOS材料的传感机制以及基于MOS的传感器检测甲醛、丙酮和其他常见挥发性有机化合物的最新进展。通过对上百项研究的分析，发现MOS材料存在工作温度高、选择性差、长期稳定性不足、易受湿度影响等问题，本文探讨了微形态调控、结构修饰、异质结复合材料构建等修饰策略如何提高MOS传感器的灵敏度、选择性和工作温度。然而，在实现多参数协同优化方面仍然存在挑战，阻碍了实际应用。本文旨在总结目前用于VOC检测的各种MOS材料的研究方法，为开发高效VOC传感器提供设计原则和性能基准。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...