High- κ HfO2/ZrO2 superlattice for BEOL-compatible GAAFET memory device

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-06-18 DOI:10.1063/5.0274127

Chen-You Wei, Kuei-Chun Liao, Yi-Ju Yao, Cheng-En Wu, Chien-Lung Chen, Chih-Chao Yang, Fu-Ju Hou, Guang-Li Luo, Yung-Hsien Wu, Yung-Chun Wu

引用次数: 0

Abstract

In this study, a high-κ HfO2/ZrO2 superlattice (SL-HZO) was utilized as the charge-trapping layer to develop a low-temperature polycrystalline silicon (LTPS)/SL-HZO GAAFET hybrid memory while removing the blocking oxide layer. The device was fabricated using green laser crystallization technology and low-temperature microwave annealing, ensuring compatibility with back-end-of-line processes. The LTPS/SL-HZO GAAFET operates at ±4 V/100 ns, achieving 106 cycles with minimal 12.5% memory window degradation and retention exceeding 10 years. Furthermore, the device demonstrates the potential for multi-bit storage and integrated logic operation capabilities. These features underscore its potential for in-memory computing and monolithic 3D integration applications.

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用于beol兼容GAAFET存储器件的高κ HfO2/ZrO2超晶格

在本研究中，利用高κ HfO2/ZrO2超晶格（SL-HZO）作为电荷捕获层，制备低温多晶硅(LTPS)/SL-HZO GAAFET混合存储器，同时去除阻塞氧化物层。该器件采用绿色激光结晶技术和低温微波退火工艺制备，保证了后端工艺的兼容性。LTPS/SL-HZO GAAFET工作在±4 V/100 ns，实现106次循环，最小12.5%的记忆窗口退化和保留时间超过10年。此外，该器件展示了多比特存储和集成逻辑操作能力的潜力。这些特性强调了它在内存计算和单片3D集成应用中的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.