5.3 mW at 80°C, single-mode high-power 795 nm VCSEL achieved solely through intracavity design.

Abstract

We designed a vertical-cavity surface-emitting laser (VCSEL) that achieved high-power single-mode output with a 6 µm oxide aperture solely through cavity design. Anti-waveguide design was used to suppress the in-plane mode, which enhances the oscillation strength of the vertical cavity modes. By reducing the overlap between the oxide region and the standing wave, we minimize the refractive index difference of the columnar waveguide. Combined with the introduction of a λ/2 second cavity, The LP₁₁ mode is diffused into the oxidation region about 1/3, so the single mode operation was obtained. The fabricated 795 nm VCSEL achieves a maximum single-mode output power of 6.6 mW at 20°C and 5.3 mW at 80°C.