Exploration of alternative gate dielectric materials for RADFET sensors

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-06-16 DOI:10.1016/j.nimb.2025.165775

E. Amat , C. Martínez-Domingo , C. Fleta , M. Mas-Torrent , M. Lozano

引用次数: 0

Abstract

RADFETs are a low-cost option for implementing a radiation sensor. The characteristics of their gate dielectric material is the key element due to its sensitivity to ionizing radiation. We have studied alternative (high-K and organic) materials to the conventional SiO₂-based gate dielectric in order to improve the device performance. Electrical characterization in irradiated samples has been carried on to study the radiation response of each material to low levels of ionizing radiation. The HfO₂-based samples have a much higher sensitivity per unit thickness than the SiO₂-based ones. High-K based RADFETs show promising performance as gate dielectrics for future silicon based radiation sensors.

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RADFET传感器栅极介电材料的探索

radfet是实现辐射传感器的低成本选择。其栅极介质材料对电离辐射的敏感性是决定其性能的关键因素。为了提高器件性能，我们研究了替代传统sio2基栅极电介质的替代材料（高k和有机）。对辐照样品进行了电学表征，以研究每种材料在低水平电离辐射下的辐射响应。hfo2基样品的单位厚度灵敏度远高于sio2基样品。高k基radfet作为未来硅基辐射传感器的栅极介电体表现出良好的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.