Design, modeling and control of a 3 degree-of-freedom positioning system for high-precision 3D inline-metrology

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-06-05 DOI:10.1016/j.precisioneng.2025.05.015

Daniel Pechgraber , Ernst Csencsics , Georg Schitter

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引用次数: 0

Abstract

This paper presents the mechatronic design and control of a 3 degree-of-freedom (3-DoF) precision positioning system for high-precise optical 3D inline-metrology based on a dual-stage approach. It overcomes limitations of common optical 3D measurement systems due to motion blur by precisely positioning measurement systems on a metrology platform with respect to a (moving) measurement sample and additionally extends their measurement range. A comprehensive mathematical model of the system is derived and simplified to linear models suitable for classical linear control design methods. Using a modal analysis approach for system decoupling, a decentralized control scheme with individual Single-Input Single-Output controllers is developed for precisely controlling the metrology platform position in 3 DoFs. Experimental measurements on the prototype system demonstrate a maximum measurement error resulting from the positioning system of down to

7.5 μ m

12.3 μ m

(rms) during platform motion of up to 100 mm/s over a large inspection area (0.7 m × 0.5 m), as well as 147 nm (rms) error during static positioning.

查看原文本刊更多论文

高精度三维内联测量三自由度定位系统的设计、建模和控制

本文介绍了一种基于双级法的高精度光学三维内联测量用三自由度精密定位系统的机电一体化设计与控制。它通过将测量系统相对于（移动）测量样本精确定位在测量平台上，克服了普通光学三维测量系统由于运动模糊造成的局限性，并进一步扩展了其测量范围。推导了系统的综合数学模型，并将其简化为适合经典线性控制设计方法的线性模型。采用模态解耦方法，提出了一种单输入单输出控制器的分散控制方案，实现了对测量平台3自由度位置的精确控制。实验测量表明，在大范围检测区域（0.7 m × 0.5 m）内，当平台运动速度高达100 mm/s时，定位系统的最大测量误差为7.5μm ~ 12.3μm (rms)，静态定位时的最大测量误差为147 nm （rms）。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology 工程技术-工程：制造

CiteScore

7.40

自引率

5.60%

发文量

177

审稿时长

46 days

期刊介绍： Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.