Hang Zhao, Qizhe Wu, Zedi Li, Shiyuan Liu, Jinlong Zhu
{"title":"High-speed lateral-scanning white-light interferometry for etched arrays with vertical off-axis compensation.","authors":"Hang Zhao, Qizhe Wu, Zedi Li, Shiyuan Liu, Jinlong Zhu","doi":"10.1364/OL.558647","DOIUrl":null,"url":null,"abstract":"<p><p>The growing demand for fast inspection and metrology for large-scale micro-nanostructures has stimulated the development of lateral-scanning white-light interferometry (LSWLI). However, it is challenging to maintain the accuracy comparable to vertical-scanning white-light interferometry (WLI) due to the straightness of the translation stage and environmental vibration. This Letter presents a high-speed LSWLI with vertical off-axis compensation for etched arrays. The flat substrate is utilized to extract the off-axis motion of the sample during high-speed scanning. A white-light phase shifting interferometry (WLPSI) algorithm for the non-uniformly sampled interference signal is provided to recover surface topography. The experimental results demonstrated a similar height measurement accuracy compared with WLI, even though the scanning speed is 1 mm/s and the off-axis motion range is 600 nm.</p>","PeriodicalId":19540,"journal":{"name":"Optics letters","volume":"50 12","pages":"4106-4109"},"PeriodicalIF":3.1000,"publicationDate":"2025-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/OL.558647","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0
Abstract
The growing demand for fast inspection and metrology for large-scale micro-nanostructures has stimulated the development of lateral-scanning white-light interferometry (LSWLI). However, it is challenging to maintain the accuracy comparable to vertical-scanning white-light interferometry (WLI) due to the straightness of the translation stage and environmental vibration. This Letter presents a high-speed LSWLI with vertical off-axis compensation for etched arrays. The flat substrate is utilized to extract the off-axis motion of the sample during high-speed scanning. A white-light phase shifting interferometry (WLPSI) algorithm for the non-uniformly sampled interference signal is provided to recover surface topography. The experimental results demonstrated a similar height measurement accuracy compared with WLI, even though the scanning speed is 1 mm/s and the off-axis motion range is 600 nm.
期刊介绍：
The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community.
Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
