Effects of Process Parameters on Pulsed Laser Micromachining for Glass-Based Microfluidic Devices.

Abstract

Glass-based microfluidic devices are essential for applications such as diagnostics and drug discovery, which utilize their optical clarity and chemical stability. This review systematically analyzes pulsed laser micromachining as a transformative technique for fabricating glass-based microfluidic devices, addressing the limitations of conventional methods. By examining three pulse regimes-long (≥nanosecond), short (picosecond), and ultrashort (femtosecond)-this study evaluates how laser parameters (fluence, scanning speed, pulse duration, repetition rate, wavelength) and glass properties influence ablation efficiency and quality. A higher fluence improves the material ablation efficiency across all the regimes but poses risks of thermal damage or plasma shielding in ultrashort pulses. Optimizing the scanning speed balances the depth and the surface quality, with slower speeds enhancing the channel depth but requiring heat accumulation mitigation. Shorter pulses (femtosecond regime) achieve greater precision (feature resolution) and minimal heat-affected zones through nonlinear absorption, while long pulses enable rapid deep-channel fabrication but with increased thermal stress. Elevating the repetition rate improves the material ablation rates but reduces the surface quality. The influence of wavelength on efficiency and quality varies across the three pulse regimes. Material selection is critical to outcomes and potential applications: fused silica demonstrates a superior surface quality due to low thermal expansion, while soda-lime glass provides cost-effective prototyping. The review emphasizes the advantages of laser micromachining and the benefits of a wide range of applications. Future directions should focus on optimizing the process parameters to improve the efficiency and quality of the produced devices at a lower cost to expand their uses in biomedical, environmental, and quantum applications.