Research on strategies for optimizing small-sized ion beam performance to achieve figuring of mid-spatial frequency errors on complex curved mirrors

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum Pub Date : 2025-06-06 DOI:10.1016/j.vacuum.2025.114480

Meng Liu , Xiaoqiang Peng , Jie Hu , Yiang Zhang , Chaoliang Guan , Hao Hu , Hongyu Zou , Chunyang Du

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引用次数: 0

Abstract

Complex curved mirrors, featuring high design flexibility, strong aberration-correcting capabilities, and compact structures, are widely utilized in modern optical systems. Currently, ion beam figuring has achieved sub-nanometer precision. However, with the growth in the clear aperture and steepness of mirrors, stringent requirements are set for process conditions and polishing tools, and the correction of mid-spatial frequency (MSF) errors using small-sized ion beams faces great challenges. This paper introduces a method for correcting MSF errors using a small-sized ion beam generated by a conical diaphragm, and its geometric design principles are explained with a simulation model. Simulation results show that selecting appropriate geometric dimensions can effectively adjust the processing distance and significantly improve the material removal rate. Using this method, a small-sized ion beam with a full width at half maximum of 1.01 mm and a processing distance of 22.32 mm is obtained, and its peak energy is 29 times that of a traditional flat diaphragm. Finally, the form error of a complex curved mirror with a clear aperture of Φ45–210 mm and a sag difference of 16.9 mm was corrected to 3.55 nm RMS. The proposed method provides theoretical and technical support for the manufacturing of optical components with nanometer-level precision.

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优化小尺寸离子束性能以实现复杂曲面镜中频误差计算的策略研究

复杂曲面镜具有设计灵活性高、像差校正能力强、结构紧凑等特点，在现代光学系统中得到了广泛的应用。目前，离子束计算已达到亚纳米级精度。然而，随着反射镜孔径和陡度的增加，对工艺条件和抛光工具提出了严格的要求，利用小尺寸离子束修正中空间频率（MSF）误差面临巨大挑战。本文介绍了一种利用锥形隔膜产生的小尺寸离子束修正MSF误差的方法，并通过仿真模型说明了其几何设计原理。仿真结果表明，选择合适的几何尺寸可以有效调节加工距离，显著提高材料去除率。利用该方法，获得了半峰全宽1.01 mm、加工距离22.32 mm的小尺寸离子束，其峰值能量是传统平膜片的29倍。最后，将净孔径为Φ45-210 mm、凹陷差为16.9 mm的复杂曲面镜的形状误差修正为3.55 nm的RMS。该方法为纳米级精密光学元件的制造提供了理论和技术支持。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.