Fabrication and Performance Analysis of Single-Mode Polymer Waveguides and Devices

IF 2.4 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Journal Pub Date : 2025-03-27 DOI:10.1109/JPHOT.2025.3573979

Han Wu;Ruizhi Jia;Fuling Wang;Liuge Du;Xiao Xu;Jia Zhao

引用次数: 0

Abstract

Low-cost lithography and wet development process are optimized for fabricating single-mode polymer waveguides and de-vices with small gap structures on FR4 substrate. The fabricated single-mode waveguide with core dimension of 6.04 μm × 6.05 μm exhibits the transmission loss of 1.47 dB/cm and the double-end coupling loss of 1.58 dB with single-mode fibers at 1310 nm. The relationship between the bending loss and the bending radius is also investigated, and a bending radius of larger than 20 mm is recommended. In order to verify the reliability of the optimized process in fabricating devices with small feature sizes, power splitters based on directional coupler and multimode interference are designed and fabricated, and the measurement results show good agreement with the simulation results.

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单模聚合物波导及器件的制备与性能分析

优化了低成本光刻和湿显影工艺，用于在FR4衬底上制造具有小间隙结构的单模聚合物波导和器件。该单模波导芯尺寸为6.04 μm × 6.05 μm，在1310 nm处与单模光纤的传输损耗为1.47 dB/cm，双端耦合损耗为1.58 dB。研究了弯曲损失与弯曲半径的关系，建议弯曲半径大于20mm。为了验证优化工艺在小特征尺寸器件制造中的可靠性，设计并制作了基于定向耦合器和多模干涉的功率分配器，测量结果与仿真结果吻合较好。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Photonics Journal ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

4.50

自引率

8.30%

发文量

489

审稿时长

1.4 months

期刊介绍： Breakthroughs in the generation of light and in its control and utilization have given rise to the field of Photonics, a rapidly expanding area of science and technology with major technological and economic impact. Photonics integrates quantum electronics and optics to accelerate progress in the generation of novel photon sources and in their utilization in emerging applications at the micro and nano scales spanning from the far-infrared/THz to the x-ray region of the electromagnetic spectrum. IEEE Photonics Journal is an online-only journal dedicated to the rapid disclosure of top-quality peer-reviewed research at the forefront of all areas of photonics. Contributions addressing issues ranging from fundamental understanding to emerging technologies and applications are within the scope of the Journal. The Journal includes topics in: Photon sources from far infrared to X-rays, Photonics materials and engineered photonic structures, Integrated optics and optoelectronic, Ultrafast, attosecond, high field and short wavelength photonics, Biophotonics, including DNA photonics, Nanophotonics, Magnetophotonics, Fundamentals of light propagation and interaction; nonlinear effects, Optical data storage, Fiber optics and optical communications devices, systems, and technologies, Micro Opto Electro Mechanical Systems (MOEMS), Microwave photonics, Optical Sensors.