Micro-Fabricated Compact Extrinsic Fabry-Perot Sensor for In-Situ Harsh Environment Acoustic Measurement

IF 2.4 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Journal Pub Date : 2025-03-12 DOI:10.1109/JPHOT.2025.3569540

Qi Xi;Binghe Ma;Zhiyong Tian;Ruofei Li;Yinan Wang;Zhibo Ma

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引用次数: 0

Abstract

This paper presents a compact extrinsic Fabry-Perot acoustic sensor. The key component of this sensor is a SOI chip with acoustic sensing Si diaphragm of 5 mm diameter and

$2\,{\rm{\mu m}}$

thickness, which is obtained by micro fabrication process. Acoustic calibration experiment indicates that the sensor exhibits a frequency response range over 100 Hz-20 kHz, and a sensitivity of

${95}\,{\rm{.73mV/Pa}}$

. High temperature plane wave tube is established for experiment that simulates the acoustic field in harsh environment, indicating that the sensor is able to realize acoustic sensing with ambient temperature up to

${589}\,^\circ \mathrm{C}$

. The prospect of our proposed sensor is realizing multi-point, in-situ acoustic measurement in harsh environment of aerospace engine internal flow field, enabled by its batch fabrication process and high compactness as well as sensitivity, which we believe will shows great potential in significant industrial domains.

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用于原位恶劣环境声学测量的微型紧凑型外源法布里-珀罗传感器

提出了一种紧凑的外型法布里-珀罗声传感器。该传感器的关键部件是采用微加工工艺获得的直径为5mm、厚度为$2\,{\rm{\ μ m}}$的声传感硅膜的SOI芯片。声学校准实验表明，该传感器的频率响应范围在100 hz ~ 20 kHz之间，灵敏度为${95}\,{\rm{.73 mv /Pa}}$。建立了模拟恶劣环境声场的高温平面波管实验，表明该传感器能够实现环境温度高达${589}\,^\circ \ mathm {C}$的声传感。我们所提出的传感器的前景是实现航空发动机内部流场恶劣环境下的多点原位声学测量，其批量制造工艺和高紧凑性和灵敏度使其成为可能，我们相信这将在重要的工业领域显示出巨大的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Photonics Journal ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

4.50

自引率

8.30%

发文量

489

审稿时长

1.4 months

期刊介绍： Breakthroughs in the generation of light and in its control and utilization have given rise to the field of Photonics, a rapidly expanding area of science and technology with major technological and economic impact. Photonics integrates quantum electronics and optics to accelerate progress in the generation of novel photon sources and in their utilization in emerging applications at the micro and nano scales spanning from the far-infrared/THz to the x-ray region of the electromagnetic spectrum. IEEE Photonics Journal is an online-only journal dedicated to the rapid disclosure of top-quality peer-reviewed research at the forefront of all areas of photonics. Contributions addressing issues ranging from fundamental understanding to emerging technologies and applications are within the scope of the Journal. The Journal includes topics in: Photon sources from far infrared to X-rays, Photonics materials and engineered photonic structures, Integrated optics and optoelectronic, Ultrafast, attosecond, high field and short wavelength photonics, Biophotonics, including DNA photonics, Nanophotonics, Magnetophotonics, Fundamentals of light propagation and interaction; nonlinear effects, Optical data storage, Fiber optics and optical communications devices, systems, and technologies, Micro Opto Electro Mechanical Systems (MOEMS), Microwave photonics, Optical Sensors.