Multimodal perception fusion control for Czochralski crown growth in a full-scale furnace

IF 1.7 4区 材料科学 Q3 CRYSTALLOGRAPHY
Shijian Xiong , Hua Liu , Jianwei Cao , Linjian Fu , Dejun Li
{"title":"Multimodal perception fusion control for Czochralski crown growth in a full-scale furnace","authors":"Shijian Xiong ,&nbsp;Hua Liu ,&nbsp;Jianwei Cao ,&nbsp;Linjian Fu ,&nbsp;Dejun Li","doi":"10.1016/j.jcrysgro.2025.128277","DOIUrl":null,"url":null,"abstract":"<div><div>The existing controllers are stuck in simulation, lack of applicability for nonlinearity uncertainty, and time variation of Czochralski crown growth. To address the problem, a multimodal perception fusion control (MPFC) method was developed to predict the pulling speed, thereby effectively controlling diameter of the crown growth. To enhance the generalizability, MPFC integrates cross-modal knowledge mining and crystal growth kinetics to ensure the quality of crown growth and minimize the invalid output of the controller. MPFC achieved high accuracy on the test dataset, with an R-squared of 0.87 and a root mean square error (RMSE) of 3.64. MPFC was compared with ResNet + temporal convolutional network, proportional-integral-derivative controllers, and physics-informed neural networks using RMSE. Furthermore, its high accuracy, adaptability, and generalizability were validated through control simulations and experiments in a full-scale furnace under a wide range of initial states. MPFC is a robust method for industrial crown growth, enabling precise diameter control and maximized survival rates.</div></div>","PeriodicalId":353,"journal":{"name":"Journal of Crystal Growth","volume":"667 ","pages":"Article 128277"},"PeriodicalIF":1.7000,"publicationDate":"2025-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Crystal Growth","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0022024825002313","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CRYSTALLOGRAPHY","Score":null,"Total":0}
引用次数: 0

Abstract

The existing controllers are stuck in simulation, lack of applicability for nonlinearity uncertainty, and time variation of Czochralski crown growth. To address the problem, a multimodal perception fusion control (MPFC) method was developed to predict the pulling speed, thereby effectively controlling diameter of the crown growth. To enhance the generalizability, MPFC integrates cross-modal knowledge mining and crystal growth kinetics to ensure the quality of crown growth and minimize the invalid output of the controller. MPFC achieved high accuracy on the test dataset, with an R-squared of 0.87 and a root mean square error (RMSE) of 3.64. MPFC was compared with ResNet + temporal convolutional network, proportional-integral-derivative controllers, and physics-informed neural networks using RMSE. Furthermore, its high accuracy, adaptability, and generalizability were validated through control simulations and experiments in a full-scale furnace under a wide range of initial states. MPFC is a robust method for industrial crown growth, enabling precise diameter control and maximized survival rates.
全尺寸炉膛切克拉尔斯基冠生长的多模态感知融合控制
现有的控制器在仿真方面存在局限,对非线性不确定性和直拉氏冠生长的时变问题缺乏适用性。为了解决这一问题,提出了一种多模态感知融合控制(MPFC)方法来预测拔牙速度,从而有效地控制冠生长直径。为了提高算法的通用性,MPFC将跨模态知识挖掘和晶体生长动力学相结合,保证了晶体生长的质量,使控制器的无效输出最小化。MPFC在测试数据集上取得了很高的准确性,r平方为0.87,均方根误差(RMSE)为3.64。MPFC与ResNet +时间卷积网络、比例-积分-导数控制器和使用RMSE的物理信息神经网络进行了比较。通过大范围初始状态下的全尺寸加热炉控制仿真和实验,验证了该方法具有较高的精度、适应性和通用性。MPFC是一种强大的工业冠生长方法,实现精确的直径控制和最大的存活率。
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来源期刊
Journal of Crystal Growth
Journal of Crystal Growth 化学-晶体学
CiteScore
3.60
自引率
11.10%
发文量
373
审稿时长
65 days
期刊介绍: The journal offers a common reference and publication source for workers engaged in research on the experimental and theoretical aspects of crystal growth and its applications, e.g. in devices. Experimental and theoretical contributions are published in the following fields: theory of nucleation and growth, molecular kinetics and transport phenomena, crystallization in viscous media such as polymers and glasses; crystal growth of metals, minerals, semiconductors, superconductors, magnetics, inorganic, organic and biological substances in bulk or as thin films; molecular beam epitaxy, chemical vapor deposition, growth of III-V and II-VI and other semiconductors; characterization of single crystals by physical and chemical methods; apparatus, instrumentation and techniques for crystal growth, and purification methods; multilayer heterostructures and their characterisation with an emphasis on crystal growth and epitaxial aspects of electronic materials. A special feature of the journal is the periodic inclusion of proceedings of symposia and conferences on relevant aspects of crystal growth.
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