Design of Transparent Nonmagnetic Electric Heating Film Based on MEMS Technology for Microalkali Metal Vapor Cell

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-04-25 DOI:10.1109/JSEN.2025.3562578

Sitian Wu;Si Zhu;Weiqian Wang;Zhen Li;Jinguo Mu;Xiangyang Zhou

{"title":"Design of Transparent Nonmagnetic Electric Heating Film Based on MEMS Technology for Microalkali Metal Vapor Cell","authors":"Sitian Wu;Si Zhu;Weiqian Wang;Zhen Li;Jinguo Mu;Xiangyang Zhou","doi":"10.1109/JSEN.2025.3562578","DOIUrl":null,"url":null,"abstract":"Aiming to address the limitations of traditional heating films in balancing the magnetic field suppression and uniform heating in spin-exchange relaxation-free (SERF) atomic magnetometer applications, this article designs a transparent, nonmagnetic electric heating film based on the MEMS technology, in which indium tin oxide (ITO) is used as the core heating material. First, a model is developed to analyze the spatial magnetic field strength induced by current flowing in different directions through the wiring. The layout design of the heating film is then optimized through the quantitative analysis and simulation. Next, ITO, a transparent material, is selected and processed using the MEMS technology. This successfully addresses the condensation issue at the optical apertures of traditional flexible printed circuit (FPC) heating films, which is caused by uneven heating, thereby improving the heating uniformity. The final experiment validated the feasibility and effectiveness of the design. The experimental results show that the magnetic flux density of the designed heating film under dc conditions is 0.8154 nT/mA. Under the same heating conditions, the temperature variance in the vapor cell area decreased from <inline-formula> <tex-math>$0.0125~^{\\circ } {\\text {C}}^{{2}}$ </tex-math></inline-formula> for traditional heating films to <inline-formula> <tex-math>$0.0103~^{\\circ } {\\text {C}}^{{2}}$ </tex-math></inline-formula>, with a particularly significant temperature increase observed in the optical aperture region. Experimental data confirm that the MEMS-based transparent heating film developed in this study demonstrates significant advantages in both magnetic field suppression and heating uniformity.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 11","pages":"18962-18970"},"PeriodicalIF":4.3000,"publicationDate":"2025-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10977739/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

Aiming to address the limitations of traditional heating films in balancing the magnetic field suppression and uniform heating in spin-exchange relaxation-free (SERF) atomic magnetometer applications, this article designs a transparent, nonmagnetic electric heating film based on the MEMS technology, in which indium tin oxide (ITO) is used as the core heating material. First, a model is developed to analyze the spatial magnetic field strength induced by current flowing in different directions through the wiring. The layout design of the heating film is then optimized through the quantitative analysis and simulation. Next, ITO, a transparent material, is selected and processed using the MEMS technology. This successfully addresses the condensation issue at the optical apertures of traditional flexible printed circuit (FPC) heating films, which is caused by uneven heating, thereby improving the heating uniformity. The final experiment validated the feasibility and effectiveness of the design. The experimental results show that the magnetic flux density of the designed heating film under dc conditions is 0.8154 nT/mA. Under the same heating conditions, the temperature variance in the vapor cell area decreased from

$0.0125~^{\circ } {\text {C}}^{{2}}$

for traditional heating films to

$0.0103~^{\circ } {\text {C}}^{{2}}$

, with a particularly significant temperature increase observed in the optical aperture region. Experimental data confirm that the MEMS-based transparent heating film developed in this study demonstrates significant advantages in both magnetic field suppression and heating uniformity.

查看原文本刊更多论文

基于MEMS技术的微碱金属蒸汽电池透明非磁性电加热膜设计

针对传统加热膜在自旋交换无松弛（SERF）原子磁强计应用中在平衡磁场抑制和均匀加热方面存在的局限性，本文以氧化铟锡（ITO）为核心加热材料，设计了一种基于MEMS技术的透明非磁性电加热膜。首先，建立了电流沿不同方向流过导线时产生的空间磁场强度模型。通过定量分析和仿真，优化了加热膜的布局设计。接下来，选择透明材料ITO，并使用MEMS技术进行加工。成功地解决了传统柔性印刷电路（FPC）加热膜因受热不均匀而导致的光学孔处的凝结问题，从而提高了加热均匀性。最后的实验验证了设计的可行性和有效性。实验结果表明，所设计的加热膜在直流条件下的磁通密度为0.8154 nT/mA。在相同的加热条件下，蒸汽池区域的温度变化从传统加热膜的$0.0125~^{\circ} {\text {C}}^{{2}}$减小到$0.0103~^{\circ} {\text {C}}^{{2}}$，其中光学孔径区域的温度升高尤为显著。实验数据证实，本研究开发的基于mems的透明加热膜在磁场抑制和加热均匀性方面都具有显著的优势。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice