Resonance suppression of a piezo-actuated nanopositioning stage based on recursive positive velocity feedback control

IF 4.6 2区计算机科学 Q1 AUTOMATION & CONTROL SYSTEMS

Control Engineering Practice Pub Date : 2025-06-04 DOI:10.1016/j.conengprac.2025.106422

Suan Xu , Tengfei Chen , Kaixing Hong , Lushuai Qian , Yaping Xu , Luc Chassagne

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Abstract

The piezo-actuated nanopositioning stage is widely used in the applications requiring precise motion and control at the nanometer level, which determines whether the system is capable of high precision and fast response. In order to suppress the low-damping resonance of the one-dimensional nanopositioning stage, this paper proposes a novel dual-loop control method that combines recursive positive velocity feedback (RPVF) control and displacement tracking control. The RPVF-based inner control loop is proposed to mitigate the resonance mode of the nanopositioning stage, and the softplus function and simulated annealing are used to improve the flamingo search algorithm for parameter configuration. The proportional–integral (PI) controller is introduced in the outer loop to overcome the problems remain in the system after vibration compensation, such as hysteresis and creep. The experimental results show that the proposed controller combining RPVF and PI effectively suppresses the low-damping resonance modes of the nanopositioning stage and achieves outstanding performance in control bandwidth, step response and trajectory tracking.

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基于递归正速度反馈控制的压电驱动纳米定位平台的共振抑制

压电驱动的纳米定位平台广泛应用于需要精确运动和控制的纳米级应用中，这决定了系统是否具有高精度和快速响应的能力。为了抑制一维纳米定位平台的低阻尼共振，提出了一种将递推正速度反馈（RPVF）控制与位移跟踪控制相结合的新型双环控制方法。提出了基于rpvf的内控制回路来缓解纳米定位阶段的共振模式，并利用softplus函数和模拟退火来改进火烈鸟搜索算法进行参数配置。在外环引入比例积分（PI）控制器，克服了振动补偿后系统存在的滞回、蠕变等问题。实验结果表明，RPVF和PI相结合的控制器有效抑制了纳米定位阶段的低阻尼共振模式，在控制带宽、阶跃响应和轨迹跟踪方面取得了优异的性能。

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来源期刊

Control Engineering Practice 工程技术-工程：电子与电气

CiteScore

9.20

自引率

12.20%

发文量

183

审稿时长

44 days

期刊介绍： Control Engineering Practice strives to meet the needs of industrial practitioners and industrially related academics and researchers. It publishes papers which illustrate the direct application of control theory and its supporting tools in all possible areas of automation. As a result, the journal only contains papers which can be considered to have made significant contributions to the application of advanced control techniques. It is normally expected that practical results should be included, but where simulation only studies are available, it is necessary to demonstrate that the simulation model is representative of a genuine application. Strictly theoretical papers will find a more appropriate home in Control Engineering Practice''s sister publication, Automatica. It is also expected that papers are innovative with respect to the state of the art and are sufficiently detailed for a reader to be able to duplicate the main results of the paper (supplementary material, including datasets, tables, code and any relevant interactive material can be made available and downloaded from the website). The benefits of the presented methods must be made very clear and the new techniques must be compared and contrasted with results obtained using existing methods. Moreover, a thorough analysis of failures that may happen in the design process and implementation can also be part of the paper. The scope of Control Engineering Practice matches the activities of IFAC. Papers demonstrating the contribution of automation and control in improving the performance, quality, productivity, sustainability, resource and energy efficiency, and the manageability of systems and processes for the benefit of mankind and are relevant to industrial practitioners are most welcome.