Inducing ferroelectric o-phase in spray-pyrolyzed ZrO2 by La doping for high-performance InGaZnO ferroelectric thin-film transistors

IF 2.7 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Letters Pub Date : 2025-05-29 DOI:10.1016/j.matlet.2025.138848

Kiwan Ahn , Md Mobaidul Islam , Yeoungjin Chang , Jin Jang

引用次数: 0

Abstract

We report the La doping effect in ZrO₂ at a substantially lower process temperature of 450 °C. The optimum La doping in ZrO₂ increases the orthorhombic phase fraction due to the reduction of bulk free and surface energy between orthorhombic phase and monoclinic phase. The 30 nm ZrO₂ demonstrates enhanced remnant polarization of 18.4 μC cm⁻² after 8 % La doping. The inverted staggered InGaZnO thin-film transistors are fabricated with 8 % La:ZrO₂ gate oxide, demonstrating memory window tuning from 1.1 to 3.5 V and low subthreshold swing of 43 mV dec⁻¹ during reverse sweep.

查看原文本刊更多论文

La掺杂在喷雾热解ZrO2中诱导铁电o相用于高性能InGaZnO铁电薄膜晶体管

我们报告了在450°C的较低工艺温度下ZrO2中的La掺杂效应。ZrO2中最佳的La掺杂增加了正交相分数，因为正交相和单斜相之间的体自由能和表面能降低了。在30 nm的ZrO2中掺入8%的La后，残余极化增强了18.4 μC cm−2。采用8% La:ZrO2栅极氧化物制备了倒置交错InGaZnO薄膜晶体管，在反向扫描过程中显示出从1.1到3.5 V的记忆窗口调谐和43 mV dec−1的低亚阈值摆幅。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Materials Letters 工程技术-材料科学：综合

CiteScore

5.60

自引率

3.30%

发文量

1948

审稿时长

50 days

期刊介绍： Materials Letters has an open access mirror journal Materials Letters: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. Materials Letters is dedicated to publishing novel, cutting edge reports of broad interest to the materials community. The journal provides a forum for materials scientists and engineers, physicists, and chemists to rapidly communicate on the most important topics in the field of materials. Contributions include, but are not limited to, a variety of topics such as: • Materials - Metals and alloys, amorphous solids, ceramics, composites, polymers, semiconductors • Applications - Structural, opto-electronic, magnetic, medical, MEMS, sensors, smart • Characterization - Analytical, microscopy, scanning probes, nanoscopic, optical, electrical, magnetic, acoustic, spectroscopic, diffraction • Novel Materials - Micro and nanostructures (nanowires, nanotubes, nanoparticles), nanocomposites, thin films, superlattices, quantum dots. • Processing - Crystal growth, thin film processing, sol-gel processing, mechanical processing, assembly, nanocrystalline processing. • Properties - Mechanical, magnetic, optical, electrical, ferroelectric, thermal, interfacial, transport, thermodynamic • Synthesis - Quenching, solid state, solidification, solution synthesis, vapor deposition, high pressure, explosive