Optical waveguides in Pr:LuAG crystals fabricated by carbon ion implantation and femtosecond laser ablation

Abstract

By combining C ion implantation with femtosecond laser ablation, the planar and ridge waveguides were fabricated in Pr³⁺-doped Lu₃Al₅O₁₂ (Pr:LuAG) crystals. The energy loss of 6.0 MeV C ions into Pr:LuAG crystal was simulated using the Stopping and Range of Ions in Matter (SRIM) software. To assess the optical confinement capabilities of the waveguides, the dark mode spectra were measured by a prism-coupling system, and the end-face coupling method was employed to acquire the near-field mode distribution. Fluorescent characteristics of Pr³⁺ ions were investigated through photoluminescence emission spectra and decay curves. The waveguide microstructures were characterized by Raman spectroscopy and reflectance-difference spectroscopy (RDS).