Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping.

IF 3 3区工程技术 Q2 CHEMISTRY, ANALYTICAL

Micromachines Pub Date : 2025-05-21 DOI:10.3390/mi16050601

Wenjing Liu, Axiu Cao, Junbo Liu, Hui Pang, Qiling Deng, Jian Wang, Song Hu

引用次数: 0

Abstract

To address the demand for laser beam-shaping techniques, we developed a one-step exposure process based on moving-mask lithography for the fabrication of a continuous-surface diffractive optical element (DOE) for laser beam shaping. The fabrication process is described in detail, and the influence of key parameters, such as pre-baking conditions, exposure gaps, development conditions, and post-baking conditions, of the lithography process on the microstructure profile of the DOE is analyzed. The reliability of the preparation method was verified through optical performance experiments. The speckle contrast, uniformity, and diffraction efficiency of the prepared linear beam-shaping element are 4.2%, 97.3%, and 87%.

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光刻工艺参数对激光光束整形用连续面衍射光学元件的影响。

为了满足激光束整形技术的需求，我们开发了一种基于移动掩模光刻的一步曝光工艺，用于制造用于激光束整形的连续表面衍射光学元件（DOE）。详细介绍了制作工艺，分析了光刻工艺的预焙条件、曝光间隙、显影条件、后焙条件等关键参数对DOE微结构的影响。通过光学性能实验验证了该制备方法的可靠性。所制备的线性光束整形元件的散斑对比度、均匀性和衍射效率分别为4.2%、97.3%和87%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION

CiteScore

5.20

自引率

14.70%

发文量

1862

审稿时长

16.31 days

期刊介绍： Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.