Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields.

IF 3 3区工程技术 Q2 CHEMISTRY, ANALYTICAL

Micromachines Pub Date : 2025-05-21 DOI:10.3390/mi16050600

Boyue Su, Yujie Zhang, Feng Yu, Pengfei Kang, Tingfeng Ma, Peng Li, Zhenghua Qian, Iren Kuznetsova, Vladimir Kolesov

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引用次数: 0

Abstract

For relaxor ferroelectric single crystal (1 - x)Pb(Mg_1/3Nb_2/3)O₃ - xPbTiO₃ (PMN-PT), through reasonable component regulation and electric field polarization, an orthogonal mm² point group structure can be obtained, which has high piezoelectric constants and is, therefore, a desired substrate material for lateral-field-excited (LFE) bulk acoustic wave (BAW) devices. In this work, acoustic wave resonance characteristics of (zxt) 45° PMN-PT BAW devices with LFE are investigated. Firstly, Mindlin first-order plate theory is used to obtain vibration governing equations of orthorhombic crystals excited by a lateral electric field. By analyzing the electrically forced vibrations of the finite plate, the basic vibration characteristics, such as motional capacitance, resonant frequency, and mode shape are obtained, and influences of different electrode parameters on resonance characteristics of the device are investigated. In addition, the effects of the structure parameters on the mass sensitivity of the devices are analyzed and further verified by FEM simulations. The model presented in this study can be conveniently used to optimize the structural parameters of LFE bulk acoustic wave devices based on orthorhombic crystals, which is crucial to obtain good resonance characteristics. The results provide an important basis for the design of LFE bulk acoustic wave resonators and sensors by using PMN-PT orthorhombic crystals.

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侧向电场激励下PMN-PT正交晶片体声波共振特性

对于弛弛性铁电单晶（1 - x）Pb(Mg1/3Nb2/3)O3 - xPbTiO3 (PMN-PT)，通过合理的组分调节和电场极化，可以得到正交mm2的点群结构，该结构具有较高的压电常数，是侧场激发（LFE）体声波（BAW）器件的理想衬底材料。本文研究了（zxt） 45°PMN-PT带LFE BAW器件的声波共振特性。首先，利用Mindlin一阶平板理论推导了横向电场作用下正交晶体的振动控制方程；通过对有限板的电强迫振动进行分析，得到了有限板的运动电容、谐振频率和振型等基本振动特性，并研究了不同电极参数对器件谐振特性的影响。此外，分析了结构参数对器件质量灵敏度的影响，并通过有限元仿真进行了验证。该模型可以方便地用于优化正交晶体LFE体声波器件的结构参数，这对于获得良好的谐振特性至关重要。研究结果为利用PMN-PT正交晶体设计LFE体声波谐振器和传感器提供了重要依据。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION

CiteScore

5.20

自引率

14.70%

发文量

1862

审稿时长

16.31 days

期刊介绍： Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.