Investigation of viscous damping in perforated MEMS devices.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Zeyu Jia, Yuhao Wang, Xiaoxu Wang, Xiang Xu, Jinshuai Sun, Mengqi Sun, Jian Bai, Wei Huang, Qianbo Lu
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引用次数: 0

Abstract

Perforated structures are widely employed in MEMS devices for dissipation control, energy absorption, and performance optimization. Among these, the damping weakening effect is particularly intriguing, attracting considerable attention and widespread application. Evaluating the impact of perforations on damping is crucial for enhancing the performance of MEMS devices. This paper investigates the damping tuning mechanisms of perforations and presents two theoretical models for accurately predicting viscous damping. The two models exhibit unique advantages under high and low perforation ratios, respectively. Both models account for complex boundary conditions and various hole geometries, including cylindrical, conical, prismatic, and trapezoidal holes. Modeling and simulations demonstrate the complementarity of the two models, enabling accurate viscous damping predictions across nearly all perforation ratios. Subsequently, the theoretical models are validated through a series of vibration tests on perforated oscillators, with errors consistently controlled within 10%. Experimental results demonstrate that perforations can easily achieve a damping reduction of more than one order of magnitude. Moreover, compared to normal cylindrical holes, trapezoidal holes are found to achieve superior damping reduction with a smaller sacrifice in surface area, which holds great potential for capacitive, acoustic, and optical MEMS devices. This work lays the foundation for viscous damping design and optimization of MEMS device dynamics, creating new applications.

多孔MEMS器件的粘性阻尼研究。
穿孔结构在MEMS器件中广泛应用于耗散控制、能量吸收和性能优化。其中,阻尼弱化效应尤其引人注目,引起了相当大的关注和广泛的应用。评估穿孔对阻尼的影响对于提高MEMS器件的性能至关重要。本文研究了射孔的阻尼调谐机理,提出了两种精确预测粘性阻尼的理论模型。两种模型在高射孔比和低射孔比下分别表现出独特的优势。这两种模型都考虑了复杂的边界条件和各种孔的几何形状,包括圆柱孔、圆锥孔、棱柱孔和梯形孔。建模和仿真证明了两种模型的互补性,可以在几乎所有射孔比下进行准确的粘性阻尼预测。随后,通过一系列穿孔振子振动试验对理论模型进行验证,误差始终控制在10%以内。实验结果表明,穿孔可以很容易地实现一个数量级以上的阻尼降低。此外,与正常的圆柱形孔相比,梯形孔具有更好的减振效果,且表面积损失更小,这在电容、声学和光学MEMS器件中具有很大的潜力。这项工作为MEMS器件动力学的粘性阻尼设计和优化奠定了基础,创造了新的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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