Development of imprint mold with F+ ion implantation for detachability

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-05-24 DOI:10.1016/j.nimb.2025.165753

Kazuki Komiya , Yoshikazu Teranishi , Hidehiko Yamaoka , Shuichi Date , Ming Yang

引用次数: 0

Abstract

In this study, F⁺ ions were implanted into SiOx films using an accelerator to improve the peelability of nanoimprints. Various properties, including wettability, surface roughness, lateral friction force, and surface hardness, were evaluated. The results indicated that increasing the implantation dose of F⁺ ions improved the transverse friction coefficient but decreased the surface hardness. It was also determined that an implantation dose of 1.0 × 10¹⁴ ions/cm² was optimal for hydrophobicity because of an increased surface roughness.

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可拆卸型氟离子注入压印模的研制

在本研究中，使用加速器将F+离子注入SiOx薄膜，以提高纳米印迹的可剥离性。评估了各种性能，包括润湿性、表面粗糙度、侧向摩擦力和表面硬度。结果表明：随着注入量的增加，材料的横向摩擦系数提高，表面硬度降低；由于表面粗糙度的增加，植入剂量为1.0 × 1014离子/cm2是疏水性的最佳选择。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.