Wide-range absolute angle measurement based on a broadband solid etalon fringe using a mode-locked femtosecond laser

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-20 DOI:10.1016/j.precisioneng.2025.05.012

DongWook Shin, Hiraku Matsukuma, Ryo Sato, Wei Gao

{"title":"Wide-range absolute angle measurement based on a broadband solid etalon fringe using a mode-locked femtosecond laser","authors":"DongWook Shin, Hiraku Matsukuma, Ryo Sato, Wei Gao","doi":"10.1016/j.precisioneng.2025.05.012","DOIUrl":null,"url":null,"abstract":"<div><div>A wide-range absolute angle measurement method based on a broadband interference fringe of a Fabry-Pérot solid etalon using a mode-locked femtosecond laser is investigated. A novel method for interference order determination, which utilizes the inherent sequential correlation of interference orders between multiple fringe peaks, is proposed to enable wide-range angle measurements without phase ambiguity problem. To ensure absolute angle measurement accuracy, the dispersion formula of the solid etalon corresponding to its nominal thickness is derived using an angle scanning method to determine accurate angle measurement parameters. Measurement experiments using a constructed optical setup are conducted to validate both the proposed interference order determination technique and measurement performances using derived dispersion formula.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 484-494"},"PeriodicalIF":3.5000,"publicationDate":"2025-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0141635925001631","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}

引用次数: 0

Abstract

A wide-range absolute angle measurement method based on a broadband interference fringe of a Fabry-Pérot solid etalon using a mode-locked femtosecond laser is investigated. A novel method for interference order determination, which utilizes the inherent sequential correlation of interference orders between multiple fringe peaks, is proposed to enable wide-range angle measurements without phase ambiguity problem. To ensure absolute angle measurement accuracy, the dispersion formula of the solid etalon corresponding to its nominal thickness is derived using an angle scanning method to determine accurate angle measurement parameters. Measurement experiments using a constructed optical setup are conducted to validate both the proposed interference order determination technique and measurement performances using derived dispersion formula.

查看原文本刊更多论文

利用锁模飞秒激光器进行宽带固体标准条纹宽范围绝对角度测量

研究了一种利用锁模飞秒激光测量法布里-普氏固体标准子宽带干涉条纹的大范围绝对角度测量方法。提出了一种新的干涉阶数确定方法，利用多条纹峰间干涉阶数固有的序列相关性，实现了宽角度测量而不存在相位模糊问题。为保证绝对角度测量精度，采用角度扫描法推导出固体标准龙与其标称厚度对应的色散公式，确定精确的角度测量参数。利用自制的光学装置进行了测量实验，验证了所提出的干涉阶确定技术和利用推导出的色散公式的测量性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology 工程技术-工程：制造

CiteScore

7.40

自引率

5.60%

发文量

177

审稿时长

46 days

期刊介绍： Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.