Can MEMS-based particulate matter sensors reliably measure mass?

IF 4.9 Q1 CHEMISTRY, ANALYTICAL
Tony Merrien , Julien Sorel , Frédéric Marty , Pierre Didier , Emmanuelle Algré , Evelyne Géhin
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引用次数: 0

Abstract

Micro-electro-mechanical systems (MEMS) have emerged as promising candidates for particulate matter (PM) mass sensing due to their high sensitivity and integration potential. However, their practical deployment is hindered by unresolved challenges in calibration and sensor behavior interpretation under different loading conditions. In this work, we present a combined theoretical and experimental framework to investigate the performance and limitations of MEMS-based PM sensors. A bulk-mode MEMS microbalance with T-shaped tethers was designed to simultaneously address key issues such as active surface area, spatial sensitivity, and parasitic feedthrough currents. Controlled polystyrene latex (PSL) particle deposition experiments were conducted using an inertial impactor, and deposited masses in the nanogram range were estimated through automated microscope counting. Frequency shifts were measured using a lock-in amplifier and analyzed for different spherical particle diameters ranging from 1μm to 7μm. The results reveal significant deviations from the classical mass-loading relationship and are explained through a modified Sauerbrey model that incorporates particle-substrate contact mechanics and rolling dynamics, leading to an effective mass term dependent on particle size and adhesion. Smaller particles were found to appear “heavier” than their physical mass, while larger particles were found to appear “lighter”. This study demonstrates that MEMS-based PM sensors are not purely mass sensors, but rather multi-parameter systems influenced by particle adhesion and inertia. These findings highlight the need for a re-evaluation of existing calibration strategies and open new perspectives for designing MEMS sensors capable of extracting both mass and contact-specific information from airborne particles.
基于mems的颗粒物传感器能否可靠地测量质量?
微机电系统(MEMS)由于其高灵敏度和集成潜力而成为颗粒物质(PM)质量传感的有希望的候选者。然而,它们的实际部署受到未解决的校准和不同负载条件下传感器行为解释挑战的阻碍。在这项工作中,我们提出了一个结合理论和实验的框架来研究基于mems的PM传感器的性能和局限性。设计了一种带有t形系带的体模MEMS微天平,以同时解决诸如有效表面积、空间灵敏度和寄生馈通电流等关键问题。利用惯性冲击器进行了可控聚苯乙烯乳胶(PSL)颗粒沉积实验,并通过自动显微镜计数估计了沉积质量在纳克范围内。采用锁相放大器测量了1 ~ 7μm不同直径的球形颗粒的频移,并对其进行了分析。结果显示了与经典质量-载荷关系的显著差异,并通过改进的Sauerbrey模型进行了解释,该模型结合了颗粒-衬底接触力学和滚动动力学,从而得出了依赖于颗粒大小和附着力的有效质量项。研究发现,较小的粒子看起来比它们的物理质量“重”,而较大的粒子看起来“轻”。研究表明,基于mems的PM传感器不是单纯的质量传感器,而是受颗粒附着和惯性影响的多参数系统。这些发现强调了重新评估现有校准策略的必要性,并为设计能够从空气中颗粒提取质量和接触特定信息的MEMS传感器开辟了新的视角。
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来源期刊
Sensing and Bio-Sensing Research
Sensing and Bio-Sensing Research Engineering-Electrical and Electronic Engineering
CiteScore
10.70
自引率
3.80%
发文量
68
审稿时长
87 days
期刊介绍: Sensing and Bio-Sensing Research is an open access journal dedicated to the research, design, development, and application of bio-sensing and sensing technologies. The editors will accept research papers, reviews, field trials, and validation studies that are of significant relevance. These submissions should describe new concepts, enhance understanding of the field, or offer insights into the practical application, manufacturing, and commercialization of bio-sensing and sensing technologies. The journal covers a wide range of topics, including sensing principles and mechanisms, new materials development for transducers and recognition components, fabrication technology, and various types of sensors such as optical, electrochemical, mass-sensitive, gas, biosensors, and more. It also includes environmental, process control, and biomedical applications, signal processing, chemometrics, optoelectronic, mechanical, thermal, and magnetic sensors, as well as interface electronics. Additionally, it covers sensor systems and applications, µTAS (Micro Total Analysis Systems), development of solid-state devices for transducing physical signals, and analytical devices incorporating biological materials.
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