Effects of stoichiometry and substrate temperature on the mechanical properties of (ZrxTa1−x)By films

IF 5.3 2区材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS

Surface & Coatings Technology Pub Date : 2025-05-21 DOI:10.1016/j.surfcoat.2025.132310

Yung-I Chen , Yu-Ting Ye , Li-Chun Chang , Ting-Kai Chang

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引用次数: 0

Abstract

(Zr_xTa_1−x)B_y films with various stoichiometric ratios (y) and Zr/(Zr + Ta) ratios (x) were fabricated through cosputtering by using ZrB₂ and Ta or TaB₂ targets. The crystallinity of the fabricated films changed from amorphous to nanocrystalline and then crystalline as the stoichiometric ratio was increased, with these changes accompanied by improvements in the films' mechanical properties. Moreover, the hardness of near-stoichiometric (Zr_xTa_1−x)B_y films was enhanced to 36.6 GPa by increasing the substrate temperature to 400 °C during the deposition process. This process resulted in the crystal morphology changing from a nanoscale granular structure to a columnar structure. A Cr interlayer improved the adhesion of the aforementioned films to SUS304 stainless-steel substrates, and a soft CrN top layer enhanced the wear resistance of the (Zr_xTa_1−x)B_y/Cr/SUS304 assembly.

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化学计量学和衬底温度对（ZrxTa1−x）By薄膜力学性能的影响

（ZrxTa1−x）以ZrB2和Ta或TaB2为靶材，通过溅射法制备了具有不同化学计量比(y)和Zr/(Zr + Ta)比(x)的薄膜。随着化学计量比的增加，制备的薄膜的结晶度由无定形到纳米晶再到结晶，这些变化伴随着薄膜力学性能的改善。此外，在沉积过程中，将衬底温度提高到400℃，近化学计量（ZrxTa1−x）By薄膜的硬度提高到36.6 GPa。这一过程导致晶体形态由纳米级颗粒结构转变为柱状结构。Cr中间层提高了上述膜与SUS304不锈钢基体的附着力，软CrN顶层提高了（ZrxTa1−x）By/Cr/SUS304组件的耐磨性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Surface & Coatings Technology 工程技术-材料科学：膜

CiteScore

10.00

自引率

11.10%

发文量

921

审稿时长

19 days

期刊介绍： Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.