Formation of 3D-Cr2(C1-yOy) at Cr2AlC / AlOx interfaces

IF 6.3 2区材料科学 Q2 CHEMISTRY, PHYSICAL

Applied Surface Science Pub Date : 2025-05-20 DOI:10.1016/j.apsusc.2025.163590

Rajib Sahu , Peter J. Pöllmann , Dimitri Bogdanovski , Clio Azina , Ganesh Kumar Nayak , Jochen M. Schneider , Christina Scheu

引用次数: 0

Abstract

We report on the microstructural characterization of a multilayer AlO_x-Cr₂AlC thin film grown at 580 °C by direct current magnetron sputtering. Instead of stabilizing a two-dimensional carbide derivative, intentional periodic excess oxygen incorporation during thin film deposition leads to the formation of a 3D-Cr₂(C_1-yO_y) phase within the AlO_x-Cr₂AlC multilayered film. The microstructure of the film was investigated by combining various imaging techniques in aberration corrected scanning transition electron microscopy. The distribution of C and related defects at atomic scale was revealed by the integrated differential phase contrast method.

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Cr2AlC / AlOx界面上3D-Cr2（C1-yOy）的形成

我们报道了在580 °C下用直流磁控溅射生长的多层AlOx-Cr2AlC薄膜的微观结构表征。而不是稳定二维碳化物衍生物，在薄膜沉积过程中有意的周期性过量氧的掺入导致在AlOx-Cr2AlC多层膜内形成3D-Cr2（C1-yOy）相。结合各种成像技术在像差校正扫描跃迁电子显微镜下研究了薄膜的微观结构。采用积分差相衬法揭示了C的原子尺度分布及相关缺陷。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Surface Science 工程技术-材料科学：膜

CiteScore

12.50

自引率

7.50%

发文量

3393

审稿时长

67 days

期刊介绍： Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.