Wafer-scale synthesis of transition metal dichalcogenides and van der Waals heterojunctions.

Abstract

Two-dimensional (2D) materials, as a promising class of emerging materials, are expected to overcome the technical bottlenecks of silicon-based device miniaturization and enable the continuation of "Moore's Law" due to their unique physical and chemical properties. Notably, transition metal dichalcogenides (TMDs) and heterojunctions have demonstrated unprecedented application potential in novel electronic and optoelectronic devices. In recent years, breakthroughs have been continuously made in the preparation techniques and growth strategies of wafer-scale TMDs and heterostructures. Therefore, it is essential to systematically and comprehensively summarize the latest progress in wafer-scale synthesis. This article provides an in-depth review of the relevant preparation techniques and strategies for wafer-scale TMDs and heterostructures. Firstly, various wafer-scale synthesis techniques are described. On this basis, the synthesis strategies derived from chemical vapor deposition (CVD) are highlighted. Finally, we discuss the challenges and prospects associated with the preparation of wafer-scale materials. .