Opportunities and Challenges in Using Modulated Electrostatic Softening in FM MEMS Accelerometers

IF 5.6 2区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Instrumentation and Measurement Pub Date : 2025-04-29 DOI:10.1109/TIM.2025.3565346

Christian Padovani;Luca Pileri;Leonardo Gaffuri Pagani;Philippe Robert;Giacomo Langfelder

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引用次数: 0

Abstract

This work advances the research on time-switched frequency-modulated (FM) accelerometers by presenting both a new device and a new measurement architecture. The sensor exploits nanopiezoresistive gauges to minimize the oscillator frequency noise down to sub-sub-10

$\mu $

$\sqrt {\text {Hz}}$

equivalent acceleration density, while at the same time holding almost 100-g full-scale. The corresponding dynamic range is promising for several applications; however, this article also shows how the theoretical performance is affected by noise associated with a pair of modulating voltage waveforms, required by the specific working principle. Exploiting a digital generation of these waves and low-noise digital-to-analog converters (DACs), the effect is only partially mitigated. Nevertheless, the system experimentally reaches up to 65-g full-scale and holds as low as 30-

$\mu $

g stability at almost 1000-s observation interval.

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调制静电软化应用于调频MEMS加速度计的机遇与挑战

本工作提出了一种新的器件和新的测量结构，推动了时开关调频加速度计的研究。该传感器利用纳米电阻计将振荡器频率噪声降至sub-sub-10 $\mu $ g/ $\sqrt {\text {Hz}}$等效加速度密度，同时保持近100 g满量程。相应的动态范围在几种应用中是有前景的；然而，本文还展示了理论性能如何受到特定工作原理所需的一对调制电压波形相关噪声的影响。利用这些波的数字生成和低噪声数模转换器（dac），这种影响只能部分减轻。尽管如此，该系统在实验中达到了65g的满量程，并在近1000秒的观察间隔内保持低至30- $\mu $ g的稳定性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Instrumentation and Measurement 工程技术-工程：电子与电气

CiteScore

9.00

自引率

23.20%

发文量

1294

审稿时长

3.9 months

期刊介绍： Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.