Structural, optical and electrical properties of ZnO thin films deposited in the plane direction (002) by ultrasonic spray pyrolysis using nitrogen as carrier gas

IF 3.9 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Science and Engineering: B Pub Date : 2025-05-16 DOI:10.1016/j.mseb.2025.118430

E. Rincon-Suarez , J.M. Mozo , Anabel Romero-López , S. Alcántara-Iniesta , Francisco J. Flores-Ruiz , L.E. Serrano

引用次数: 0

Abstract

Zinc oxide (ZnO) holds promise for diverse applications, particularly when deposited along the (002) crystalline plane, enhancing conductivity and transparency. This study examines the optical, electrical, structural, and morphological properties of ZnO films. Nitrogen and air as carrier gas to promoted (002) orientation, confirmed by X-ray diffraction (XRD), with an average crystallite size of 19 nm. The films exhibited high transmittance (>80 %), a band gap of ∼ 3.17 eV, and grain sizes of ∼ 60 nm observed via scanning electron microscopy (SEM). Resistivity was 0.54 Ω cm, and energy dispersive spectroscopy (EDS) showed an atomic composition of ∼ 53 % oxygen and 47 % zinc.

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研究了以氮气为载气，超声喷雾热解制备的平面（002）ZnO薄膜的结构、光学和电学性能

氧化锌（ZnO）具有多种应用前景，特别是当沿着（002）晶面沉积时，可以提高导电性和透明度。本研究考察了ZnO薄膜的光学、电学、结构和形态特性。x射线衍射（XRD）证实，氮气和空气作为载气促进了（002）取向，平均晶粒尺寸为19 nm。该薄膜具有高透光率（> 80%），带隙为~ 3.17 eV，通过扫描电子显微镜（SEM）观察到的晶粒尺寸为~ 60 nm。电阻率为0.54 Ω cm，能谱（EDS）显示原子组成为~ 53%的氧和47%的锌。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Materials Science and Engineering: B 工程技术-材料科学：综合

CiteScore

5.60

自引率

2.80%

发文量

481

审稿时长

3.5 months

期刊介绍： The journal provides an international medium for the publication of theoretical and experimental studies and reviews related to the electronic, electrochemical, ionic, magnetic, optical, and biosensing properties of solid state materials in bulk, thin film and particulate forms. Papers dealing with synthesis, processing, characterization, structure, physical properties and computational aspects of nano-crystalline, crystalline, amorphous and glassy forms of ceramics, semiconductors, layered insertion compounds, low-dimensional compounds and systems, fast-ion conductors, polymers and dielectrics are viewed as suitable for publication. Articles focused on nano-structured aspects of these advanced solid-state materials will also be considered suitable.