Flexible Nd3+ doped TeO2–ZnO planar waveguide

IF 3.8 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Optical Materials Pub Date : 2025-05-09 DOI:10.1016/j.optmat.2025.117109

Marcos V.M. Nishimura , Daniel K. Kumada , Stefano Varas , Alessandro Chiasera , Maurizio Ferrari , Luciana R.P. Kassab

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Abstract

Fabrication and characterization of Nd³⁺-doped TeO₂–ZnO planar waveguide deposited on a commercial AS 87 eco SCHOTT glass substrate, a flexible and ultrathin material, using RF magnetron sputtering is presented. The waveguide was evaluated using scanning electron microscopy, atomic force microscopy, m-line spectroscopy, Raman and photoluminescence spectroscopies. Film thickness of 500 ± 10 nm was obtained, with an average surface roughness of 1.2 nm. Attenuation coefficients in the near-infrared and visible regions were measured, and the refractive index was determined to be approximately 2.0 in these spectral regions. The waveguide exhibited attenuation coefficient of 1 dB/cm in the NIR and efficient Nd³⁺ emission at ∼890 nm, ∼1064 nm, and ∼1350 nm. This study highlights the significant potential of the Nd³⁺-doped TeO₂–ZnO system for advanced flexible optical devices and opens new perspectives for integrated photonics.

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柔性Nd3+掺杂TeO2-ZnO平面波导

采用射频磁控溅射技术，在AS 87 eco SCHOTT玻璃衬底上制备了Nd3+掺杂的TeO2-ZnO平面波导，并对其进行了表征。利用扫描电子显微镜、原子力显微镜、m线光谱、拉曼光谱和光致发光光谱对波导进行了评价。薄膜厚度为500±10 nm，平均表面粗糙度为1.2 nm。测量了近红外和可见光区域的衰减系数，确定了这些光谱区域的折射率约为2.0。该波导在近红外波段的衰减系数为1 dB/cm，并且在~ 890 nm、~ 1064 nm和~ 1350 nm处具有高效的Nd3+发射。该研究强调了Nd3+掺杂TeO2-ZnO体系在先进柔性光学器件中的巨大潜力，并为集成光子学开辟了新的前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optical Materials 工程技术-材料科学：综合

CiteScore

6.60

自引率

12.80%

发文量

1265

审稿时长

38 days

期刊介绍： Optical Materials has an open access mirror journal Optical Materials: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. The purpose of Optical Materials is to provide a means of communication and technology transfer between researchers who are interested in materials for potential device applications. The journal publishes original papers and review articles on the design, synthesis, characterisation and applications of optical materials. OPTICAL MATERIALS focuses on: • Optical Properties of Material Systems; • The Materials Aspects of Optical Phenomena; • The Materials Aspects of Devices and Applications. Authors can submit separate research elements describing their data to Data in Brief and methods to Methods X.