Double-layer LiNbO3 longitudinally excited shear wave resonators with ultra-large electromechanical coupling coefficient and spurious-free performance

IF 3.5 2区 物理与天体物理 Q2 PHYSICS, APPLIED
Zhen-Hui Qin, Hao Yan, Chen-Bei Hao, Shu-Mao Wu, Hua-Yang Chen, Sheng-Nan Liang, Si-Yuan Yu, Yan-Feng Chen
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引用次数: 0

Abstract

This work proposes a double-layer lithium niobate (LiNbO3) longitudinally excited shear wave resonator with an ultra-large electromechanical coupling coefficient(keff2). When the rotation of the two films is different by a certain angle, the resonator will obtain the keff2 exceeding 55%, RaR close to 26%, and no spurious mode. This ultra-large keff2 is much larger than all LiNbO3 acoustic resonators reported so far. The resonator design is flexible, because the main performance can be monotonically adjusted with the change of structural parameters. With the development of the new generation of piezoelectric resonators, this ideal and streamlined resonator is expected to become a key solution for, e.g., high-performance acoustic filters, power converters, and mechanical antennas, working from very low frequency to super high frequency.
具有超大机电耦合系数和无杂散性能的双层LiNbO3纵向激发剪切波谐振器
本文提出了一种具有超大机电耦合系数(keff2)的双层铌酸锂(LiNbO3)纵向激发剪切波谐振器。当两膜的旋转角度相差一定时,谐振器的keff2超过55%,RaR接近26%,无杂散模式。这个超大型keff2比目前报道的所有LiNbO3声学谐振器都要大得多。谐振器设计灵活,主要性能可随结构参数的变化而单调调整。随着新一代压电谐振器的发展,这种理想的流线型谐振器有望成为高性能声学滤波器、电源转换器和机械天线等领域的关键解决方案,工作范围从极低频到超高频。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Applied Physics Letters
Applied Physics Letters 物理-物理:应用
CiteScore
6.40
自引率
10.00%
发文量
1821
审稿时长
1.6 months
期刊介绍: Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.
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