Vladimir Fedorov, Karl Johnson, Dmitrii Belogolovskii, Yeshaiahu Fainman, Andrew Grieco
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引用次数: 0
Abstract
Waveguide propagation loss and coupling coefficients are key parameters that must be measured routinely following fabrication of integrated photonic chips. While multiple methods exist to measure these parameters, existing methods are either sensitive to off-chip coupling uncertainty and occupy a large footprint (cutback method) or cannot unambiguously distinguish waveguide losses from coupling coefficients (all-pass ring resonator method). In this work, we show that by performing two spectral measurements of an add-drop ring resonator, the waveguide loss and ring-waveguide coupling coefficients can be recovered and unambiguously identified. We perform uncertainty analysis and show that this method recovers waveguide loss and coupling coefficients with lower uncertainty than alternative methods in many situations. Finally, we perform several experimental demonstrations of the technique, highlighting its increased robustness to defects compared to the cutback method and its capability to measure waveguide losses and coupling coefficients on various waveguide platforms. As the add-drop ring resonator used has a relatively small footprint (roughly 200 µm x 100 µm) and unambiguous results can be obtained through measurement of individual resonances, this method represents a convenient tool for integrated photonic process development and fabrication monitoring.
波导传输损耗和耦合系数是集成光子芯片制造过程中必须常规测量的关键参数。虽然存在多种测量这些参数的方法,但现有方法要么对片外耦合不确定性敏感,占用较大的占地面积(切波法),要么无法明确区分波导损耗和耦合系数(全通环谐振器法)。在这项工作中,我们表明,通过执行两个频谱测量的加-降环谐振器,波导损耗和环-波导耦合系数可以恢复和明确识别。我们进行了不确定性分析,结果表明,在许多情况下,该方法比其他方法恢复波导损耗和耦合系数的不确定性更低。最后,我们对该技术进行了几次实验演示,强调了与切波方法相比,它对缺陷的鲁棒性增强,并且能够在各种波导平台上测量波导损耗和耦合系数。由于所使用的加降环谐振器具有相对较小的占地面积(大约200 μ m x 100 μ m),并且可以通过测量单个谐振获得明确的结果,因此该方法代表了集成光子过程开发和制造监控的方便工具。
期刊介绍:
Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.