Yan Gong, Xiang Liu, Zebin Jiang, Arthur Weber, Wen Li
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引用次数: 0
Abstract
This paper presents a thin-film, three-dimensional (3D) opto-electro array featuring four addressable microscale light-emitting diodes (LEDs) for surface cortex illumination and nine penetrating electrodes for simultaneous recording of light-evoked neural activities. Inspired by the origami concept, we have developed a meticulously designed "bridge+trench" structure that facilitates the transformation of the array from 2D to 3D while preventing damage to the thin film metal. Prior to device transformation, the shape and dimensions of the 2D array can be customized, enhancing its versatility for various applications. In addition, the arched base offers strong mechanical support to facilitate the direct insertion of the probe into tissue without any mechanical reinforcement. The array was encapsulated using polyimide and epoxy to ensure mechanical flexibility and biocompatibility of the device. The efficacy of the device was evaluated through comprehensive in vitro and in vivo characterization.
期刊介绍:
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.